粗糙金属表面非导电覆盖层厚度非接触测量技术  

Non-contact Measurement Technology for Non-conductive Coating Thickness on Rough Metal Surfaces

作　　者：王飞[1] WANG Fei(Institute of System Engineering,China Academy of Engineering Physics)

机构地区：[1]中国工程物理研究院总体工程研究所

出　　处：《仪表技术与传感器》2025年第2期96-99,108,共5页Instrument Technique and Sensor

基　　金：中国工程物理研究院基础科研规划发展项目(TCGH0401)。

摘　　要：采用接触式测量技术进行金属表面腐蚀产物厚度测量时,由于腐蚀一般为非均匀腐蚀,被测对象基底将成为粗糙表面,接触式测量探头与被测表面间的空气隙将对测试结果产生影响。为解决该问题,综合电涡流测距和电容测距2种非接触测量原理,求解探头悬空提离高度和非导电覆盖层厚度,仿真及实测研究了不同加工表面粗糙度下对于非导电覆盖层厚度的测量误差,综合电容测距和电涡流测距的粗糙金属表面非导电层厚度非接触无损测量技术大幅改善了粗糙表面空气隙带来的影响。实测表明,在常见粗糙度范围内,对于6μm厚度聚酰亚胺覆盖层的测量误差在±0.5μm以内。When measuring the thickness of corrosion products on metal surfaces using contact measurement techniques,due to the fact that corrosion is usually non-uniform,the substrate being measured can become a rough surface,and the air gap be-tween the contact measurement probe and the measured surface can affect the test results.To solve this problem,a non-contact measurement combining eddy current and capacitance measurement was used to determine the height of the suspended probe and the thickness of the non-conductive coating.The study simulated and measured the measurement error of the non-conductive coating thickness on rough metal surfaces with different surface roughness values.The non-contact and non-destructive measure-ment of the thickness of the non-conductive layer on the rough metal surface,which combined capacitive ranging and eddy current ranging,greatly improved the effect of the air gap on the rough surface.The results show that the measurement error of 6μm thickness polyimide coating is within±0.5μm in the range of common roughness values.

关 键 词：粗糙表面 电涡流测距 电容测距 非导电覆盖层 厚度测量 非接触 

分 类 号：TH822[机械工程—仪器科学与技术]