周期数对Ti/TiN/Zr/ZrN多层膜耐摩擦和耐腐蚀性能的影响  

Effect of cycle number on friction and corrosion resistance of Ti/TiN/Zr/ZrN multilayer film

作　　者：杨通晗 朱晖朝 李福球 何哲宇 莫健麒 代明江[1,2,4] 胡永俊 YANG Tonghan;ZHU Huichao;LI Fuqiu;HE Zheyu;MO Jianqi;DAI Mingjiang;HU Yongjun(School of Materials and Energy,Guangdong University of Technology,Guangzhou 510006,China;Foshan Taoyuan Institute of Advanced Manufacturing,Foshan 528225,China;Guangxi Key Laboratory of Advanced Structural Materials and Carbon Neutralization,School of Materials and Environment,Guangxi Minzu University,Nanning 530105,China;National Engineering Laboratory of Modern Materials Surface Engineering Technology,Guangdong Provincial Key Laboratory of Modern Surface Engineering Technology,Institute of New Materials,Guangdong Academy of Sciences,Guangzhou 510651,China)

机构地区：[1]广东工业大学材料与能源学院,广东广州510006 [2]佛山桃园先进制造研究院,广东佛山528225 [3]广西民族大学材料与环境学院广西先进结构材料与碳中和重点实验室,广西南宁530105 [4]广东省科学院新材料研究所现代材料表面工程技术国家工程实验室广东省现代表面工程技术重点实验室,广东广州510651

出　　处：《电镀与涂饰》2025年第3期103-111,共9页Electroplating & Finishing

基　　金：广东省特种设备检测研究院科技项目(2025JB1-1-03);粤港澳大湾区国际科技创新中心建设(2022A0505050081)。

摘　　要：[目的]氮化物多层膜的厚度直接影响膜层整体的力学性能和电化学性能,开展这方面的研究能够为多层膜的性能提升提供参考。[方法]采用真空阴极电弧离子镀技术在W6Mo5Cr4V2高速钢表面分别沉积周期数为6、10和14的Ti/TiN/Zr/ZrN多层膜。采用划痕试验仪、微纳米压痕仪、摩擦磨损试验仪和电化学工作站研究了膜层周期数对其力学性能、耐摩擦磨损性能和耐腐蚀性能的影响。[结果]随周期数增加,Ti/TiN/Zr/ZrN多层膜的硬度、弹性模量和韧性增大,耐磨性和耐蚀性变好。[结论]电弧离子镀Ti/TiN/Zr/ZrN多层膜可以显著改善高速钢的耐摩擦和耐腐蚀性能,并且适当提高周期数能够提升其耐磨性和耐蚀性。[Objective]The thickness of nitride multilayer films directly influences their overall mechanical and electrochemical properties.Study in this field can provide critical insights for optimizing the performance of multilayer films.[Method]Ti/TiN/Zr/ZrN multilayer films with cycle numbers of 6,10,and 14 were deposited on W6Mo5Cr4V2 high-speed steel surface by vacuum cathode arc ion plating.The effects of cycle number of multilayer film on its mechanical properties,wear resistance,and corrosion resistance was studied using scratch tester,micro-and nano-indentation tester,friction and wear tester,and electrochemical workstation.[Result]With the increasing of cycle number,the hardness,elastic modulus,and toughness of Ti/TiN/Zr/ZrN multilayer films were increased,the wear resistance and corrosion resistance were also improved.[Conclusion]Arc ion plating of Ti/TiN/Zr/ZrN multilayer films can significantly enhance the friction resistance and corrosion resistance of high-speed steel.Appropriately increasing the cycle number can further improve its wear resistance and corrosion resistance.

关 键 词：电弧离子镀 钛 锆 氮化物 多层膜 耐磨性 耐蚀性 周期数 

分 类 号：TQ153.2[化学工程—电化学工业]