FMEA工具在提高CVD单晶金刚石质量生产实践中的应用  

Application of FMEA Tool in Improving the Quality of CVD Single Crystal Diamond Production Practice

作　　者：潘红星 冯涛 周文涛 闫建明 韩光伟 PAN Hong-xing;FENG Tao;ZHOU Wen-tao;YAN Jian-ming;HAN Guang-wei(Zhengzhou Research Institute for Abrasives&Grinding Co.,Ltd.,Zhengzhou 450001,China)

机构地区：[1]郑州磨料磨具磨削研究所有限公司,郑州450001

出　　处：《价值工程》2025年第9期96-98,共3页Value Engineering

摘　　要：运用失效模式FMEA分析工具找出影响单晶金刚石生产过程质量的关键因素,制定相应控制措施,对原材料基片清洗处理,洁净度以及生产过程规范管控改善,单晶金刚石的合格率由87.5%提升到92.5%,为解决生产中的过程质量问题及预防提供了重要的经验。The FMEA analysis tool was used to identify the key factors affecting the quality of the single crystal diamond production process,and corresponding control were formulated.The cleaning treatment of the raw material substrates,cleanliness,and production process specifications were controlled,and the pass rate of single crystal diamonds increased from 87.5%to 92.5%.This paper provides important experience for solving process quality problems and prevention in production.

关 键 词：FMEA 单晶金刚石 过程控制 

分 类 号：P619.241[天文地球—矿床学]