微半球陀螺谐振子制造工艺研究现状  

Research Progress of Manufacturing Technology for Micro Hemispherical Gyroscope Resonator

作　　者：姚宇熠 王亚波[2] 程瑞昭 杨功流 闻泽阳 YAO Yuyi;WANG Yabo;CHENG Ruizhao;YANG Gongliu;WEN Zeyang(School of Mechanical Engineering,Zhejiang University,Hangzhou 310058;Wuhan Second Ship Design and Research Institute,Wuhan 430200;School of Instrument Science and Optoelectronic Engineering,Beihang University,Beijing 100191)

机构地区：[1]浙江大学机械工程学院,杭州310058 [2]武汉第二船舶设计研究所,武汉430200 [3]北京航空航天大学仪器科学与光电工程学院,北京100191

出　　处：《导航与控制》2025年第1期12-24,共13页Navigation and Control

基　　金：博士后科学基金(编号:2024M752780);水下信息与控制重点实验室开放基金(编号:2023-JCJQ-LB-030-10)。

摘　　要：微半球谐振陀螺是基于哥氏效应的新型微陀螺,具有结构简单、体积小、成本低、精度高、稳定性好、抗干扰能力强的特点。由于其发展潜力巨大,众多学者对微半球谐振陀螺展开研究,致力于发展更高精度、更高稳定性的陀螺系统。首先,概述了微半球谐振陀螺的工作原理。随后,将谐振子的制造工艺分为三类:微玻璃膨胀法、高温喷灯吹制法和薄膜沉积法,针对每种工艺方案,详细探讨了国内外研究机构的最新研究进展,总结了各个制造工艺方案的优缺点。最后,对微半球陀螺谐振子研究方向进行了展望。The micro hemispherical resonator gyroscope μHRG is an innovative micro-gyroscope that leverages the Coriolis effect,offering advantages such as a simple structure,compact size,low cost,high accuracy,excellent stability,and robust resistance to interference.Due to its significant potential,numerous researchers have been dedicated to advancing μHRG technology with a focus on enhancing precision and stability.Firstly,the working principle of the μHRG is summarized in this paper.Then,the manufacturing processes of the resonator are categorized into three main methods:micro glass expansion method,high-temperature blowtorch blowing method and thin-film deposition method.For each process scheme,the latest research progress of is domestic and international research institutions is discussed in detail,the advantages and disadvantages of each manufacturing process scheme are summarized.Finally,the research direction of micro hemispherical gyroscope resonator is prospected.

关 键 词：微半球谐振陀螺 惯性器件 制造工艺 研究进展 

分 类 号：V241.5[航空宇航科学与技术—飞行器设计]