导航级MEMS陀螺关键技术与发展综述  

Summary of Key Technologies and Development for Navigation-grade MEMS Resonant Gyroscope

作　　者：苏岩[1] 闫振磊 姜波 周同 黄深湖 SU Yan;YAN Zhenlei;JIANG Bo;ZHOU Tong;HUANG Shenhu(School of Mechanical Engineering,Nanjing University of Technology,Nanjing 210094)

机构地区：[1]南京理工大学机械工程学院,南京210094

出　　处：《导航与控制》2025年第1期25-41,89,共18页Navigation and Control

基　　金：国家自然科学基金面上项目(编号:62271262)。

摘　　要：MEMS陀螺属于科氏振动陀螺,具有体积小、质量小、功耗低的优势。随着MEMS设计技术和国内工艺水平的发展,MEMS陀螺的零位噪声水平不断降低,已具备实现导航级性能的潜力。介绍了近年来国内外科研单位在高精度MEMS陀螺领域的研究进展,综述了以环形陀螺、四质量陀螺、双傅科摆结构为代表的Ⅱ型陀螺以及以Honeywell和米兰理工报道的音叉结构为代表的Ⅰ型陀螺的技术特点与发展现状,探讨了Ⅰ型陀螺和Ⅱ型陀螺现阶段所具有的关键技术优势与面临的技术挑战,为国内外同行开展该类型陀螺结构科学研究并提高MEMS科氏力振动陀螺性能提供参考和借鉴。MEMS gyroscopes belong to Coriolis vibratory gyroscopes,featuring advantages of small size,low mass,and low power consumption.With the development of MEMS design technology and domestic manufacturing processes,the zero-bias noise level of MEMS gyroscopes continues to decrease,having the potential to achieve navigation-grade performance.The research progress in the field of high-precision MEMS gyroscopes by domestic and foreign research units in recent years is introduced in this paper.The technical characteristics and development status of Type Ⅱ gyroscopes represented by ring gyroscopes,quadruple-mass gyroscopes,and double Foucault pendulum structures,as well as Type Ⅰ gyroscopes represented by fork structures reported by Honeywell and Polytechnic University of Milan are summarized.The key technical advantages and challenges faced by Type Ⅰ and Type Ⅱ gyroscopes at the current stage are discussed,which providing references and insights for domestic and foreign peers to carry out scientific research on this type of gyroscope structure and improve the performance of MEMS Coriolis vibratory gyroscopes.

关 键 词：科氏振动陀螺 导航级 微机电陀螺 

分 类 号：TH82[机械工程—仪器科学与技术]