高温FTIR气体分析仪检测微量氟化物的评价  

Evaluation of detection of trace fluoride by high temperature FTIR gas analyzer

作　　者：胡树国[1] 尹冬梅 杜秋芳[1] 方梦醒 张体强[1] HU Shu-guo;YIN Dong-mei;DU Qiu-fang;Fang Meng-xing;ZHANG Ti-qiang(National Institute of Metrology,Beijing 100029,China)

机构地区：[1]中国计量科学研究院,北京100029

出　　处：《化学研究与应用》2025年第3期696-701,共6页Chemical Research and Application

基　　金：国家重点研发计划项目(2021YFF0603103)资助。

摘　　要：利用气体稀释装置发生(5~100)μmol·mol^(-1)的氮中四氟化碳、六氟乙烷、八氟丙烷、三氟甲烷和六氟丙烯气体标准,考察了其在高温傅里叶红外气体分析仪上的重复性和线性;通过两种方法计算了的5种氟化物在仪器上的检出限和不确定度。实验结果表明含量为(5~100)μmol·mol^(-1)的5种氟化物在仪器上单独测量的重复性均小于0.1%,线性系数接近0.9999,检出限小于0.1μmol·mol^(-1)。通过对四氟化碳、六氟乙烷和八氟丙烷混合气的测量发现,三种化合物之间存在一定干扰,对混合的氟化物定量时需要重新进行方法确认。检出限的测量与使用标准物质的含量、仪器噪声和仪器线性均存在相关性。The repeatability and linearity of tetrafluoromethane,hexafluoroethane,octafluoropropane,trifluoromethane and hexafluoropropylene standard gases in nitrogen at level(5~100)μmol/mol produced by a gas dilution device were investigated on a high temperature Fourier Infrared gas analyzer.The limit of detection and uncertainties of these five fluorides compounds on the instrument were calculated using two methods.The experimental results demonstrated that the repeatability of five fluorides within the range of(5~100)μmol·mol^(-1)was less than 0.1%,the linear coefficient was close to 0.9999,and the limit of detection was less than0.1μmol·mol^(-1).Measurement of the mixture containing carbon tetrafluoride,hexafluoroethane and octafluoropropane revealed that some interference among these three compounds;therefore,it is necessary to reconfirm the quantification method of mixed fluorides.The limit of detection is influenced by factors such as gas reference materials content,instrument noise level and instrument linearity.

关 键 词：高温傅里叶红外 气体分析仪 氟化物 检出限 

分 类 号：O659.37[理学—分析化学]