一种双聚焦极双栅电子枪的设计  

Design of a Double Focusing Pole Double Grid Electron Gun

作　　者：刘志霞 俞道龙 王贺飞[2] 万知之 徐季 LIU Zhixia;YU Daolong;WANG Hefei;WAN Zhizhi;XU Ji(School of electronics and information engineering,Nanjing University of Information Science and Technology Tianchang Research Institute,Nanjing 210000,China;Beijing Institute of Vacuum Electronics Technology,Beijing 100015,China)

机构地区：[1]南京信息工程大学天长研究院电子与信息工程学院,南京210000 [2]北京真空电子技术研究所,北京100015

出　　处：《真空科学与技术学报》2025年第3期257-265,共9页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金项目(62401399)。

摘　　要：文章主要设计了一种使用六棱锥内嵌圆柱体阴极结构的场发射冷阴极电子枪,通过Computer Simulation Technology粒子工作室软件对该电子枪的阳极电流和焦点尺寸进行仿真模拟,进而不断优化该电子枪的结构,最终设计出一款有效焦点尺寸约为20μm,阳极电流为3.8 mA,电子通过率达到了84.5%的双聚焦极双栅电子枪。此外,通过仿真结果发现,在双聚焦极结构电子枪中,电子枪获得最小焦点尺寸的V_(f1)/V_(f2)会随着V_(f2)增加而减小,同时,阳极电流会随着V_(f1)/V_(f2)的增加而增加,并且这一增幅会随着V_(f2)增加而显著扩大,这些发现为进一步优化电子枪的性能提供了重要的指导信息。This article mainly designs a field emission cold cathode electron gun using a hexagonal pyramid embedded cylindrical cathode structure.The anode current and focal size of the electron gun are simulated using Computer Simulation Technology particle studio software,and the structure of the electron gun is continuously optimized.Finally,a dual focusing electrode dual grid electron gun with an effective focal size of about 20μm,anode current of 3.8 mA,and electron pass rate of 84.5%is designed.In addition,simulation results showed that in the dual-focusing electrode structure electron gun,the V_(f1)/V_(f2) at which the electron gun obtains the minimum focal size decreases with increasing V_(f2).At the same time,the anode current increases with increasing V_(f1)/V_(f2),and this increase significantly expands with increasing V_(f2).These findings provide important guidance for further optimizing the performance of the electron gun.

关 键 词：双聚焦极 双栅极 冷阴极 碳纳米管 场发射 

分 类 号：TN24[电子电信—物理电子学]