基于单运动组元的双视场像方远心显微镜设计  

Design of image-side telecentric microscope with dual fields of view based on a single moving group

作　　者：杨玉霞[1] 王艳云 YANG Yuxia;WANG Yanyun(Jiyuan Vocational and Technical College,School of Mechanical and Electrical Engineering,,Jiyuan459000,China;Guangzhou City University of Technology,Guangzhou510850,China)

机构地区：[1]济源职业技术学院机电工程学院,河南济源459000 [2]广州城市理工学院,广东广州510850

出　　处：《光学技术》2025年第2期183-188,共6页Optical Technique

基　　金：2024年度河南省高等教育教学改革研究与实践项目(2024SJGLX0827)。

摘　　要：针对芯片和航空零部件等精密制造业中的高精度跨尺度检测问题,提出了一种基于单运动组元的双视场像方远心显微镜光学系统。首先,对变倍显微镜光学系统的成像原理进行了理论分析,并建立了基于单运动组元的像方远心变倍成像数学模型。然后,基于该变倍成像模型提出了一种光学系统初始结构的解算方法,并对光学系统的初始结构进行解算。最后,利用光学设计软件Zemax进行透镜替换和优化设计,得到了一个共口径双视场像方远心显微镜光学系统。该显微镜光学系统的工作光谱为1000~1700 nm,变倍比为4×,工作距离为50mm,物方最高分辨率为4.2μm。分析结果表明:该光学系统的像方远心度误差小于2.0mrad,并具有成像质量好、畸变小、变倍结构简单等优点。To address the issue of high-precision cross scale detection in precision manufacturing industries such as chips and aviation components, a dual-field-of-view image-side telecentric microscope based on a single moving group is proposed. Firstly, a theoretical analysis is conducted on the imaging principle of the variable magnification microscope optical system, and a mathematical model for image-side telecentric variable magnification imaging based on a single moving group is established. Then, based on the variable magnification imaging model, a calculation method for the initial structure of the optical system is proposed, and the initial structure of the optical system has been calculated. Finally, using optical design software Zemax for lens replacement and optimization design, a common-aperture dual-field image-side telecentric microscope optical system has been obtained. The working spectrum of the microscope optical system is 1000~1700nm, with a magnification ratio of 4×, a working distance of 50mm, and a maximum object-resolution of 4.2μm. The analysis results show that the image-side telecentric error of the optical system is less than 2.0mrad, and the microscope optical system has the advantages of good imaging quality, low distortion, and simple zoom structure.

关 键 词：几何光学 光学设计 像方远心显微镜 初始结构 双视场光学系统 

分 类 号：TH7[机械工程—仪器科学与技术]