离焦量误差对相位变更法波前传感精度的影响及解决方法  

The effect of defocus error on phase diversity wavefront sensing and its solution

作　　者：余日辉 胡新奇[1] 付德轩 李秉宸 YU Rihui;HU Xinqi;FU Dexuan;LI Bingchen(School of Optics and Photonics,Beijing Institute of Technology,Beijing100081,China)

机构地区：[1]北京理工大学光电学院,北京100081

出　　处：《光学技术》2025年第2期247-251,共5页Optical Technique

摘　　要：以离焦作为相位变更方式的经典相位变更法波前传感方法,要求离焦量准确已知,这一要求在很多应用中不易被满足,给实际应用带来不便。针对实际应用中可能存在的离焦量误差问题,仿真分析了离焦量误差对经典相位变更法波前传感精度的影响,以及对误差评价函数的影响,进而提出了基于误差评价函数的离焦量搜索算法,以解决离焦量不准确的问题,方便实用。论文还通过大量仿真验证和统计分析,验证并分析了该方法的可行性和性能水平。The classic phase diversity method in wavefront sensing, which utilizes defocusing as a means of phase diversity, necessitates precise knowledge of the defocus amount, a requirement often difficult to meet in numerous applications and thereby hindering its practical usage. Addressing the issue of potential defocus errors encountered in practical applications, conducts a simulation analysis on the effect of the defocus amount errors on the accuracy of the classic phase diversity method in wavefront sensing was conducted, as well as its effect on the error evaluation function. Consequently, a defocus amount search algorithm based on the error evaluation function is proposed to solve the problem of inaccuracies in defocus, enhancing usability in practice. This paper also verified and analyzed the feasibility and performance level of the method through extensive simulation and statistical analysis.

关 键 词：相位变更 波前传感 离焦误差 误差函数 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]