基于薄膜传感器的传动锥齿轮柔性测试技术  

Flexible testing technology of transmission bevel gear based on thin film sensor

作　　者：谷士鹏[1] GU Shipeng(Chinese Flight Test Establishment,Xi'an 710089,China)

机构地区：[1]中国飞行试验研究院,陕西西安710089

出　　处：《中国测试》2025年第3期170-176,共7页China Measurement & Test

基　　金：航空科学基金项目资助(20194603001)。

摘　　要：通过分析溅射气压对PdCr薄膜电阻温度系数的影响以及退火条件对Pt薄膜电阻率的影响,采用掩模板方法实现应变薄膜与热电阻薄膜图形化处理,并利用高温银浆烧结实现引线与敏感层薄膜的稳定连接,建立由Ni基合金基带、Y2O3过渡层、AlON-Al2O3复合绝缘层、PdCr应变敏感层/Pt热电阻敏感层、Al2O3防护层组成的薄膜传感器设计方法。将薄膜应变传感器、薄膜热电阻传感器同时柔性安装于传动锥齿轮进行试验测试。结果表明,在外部应力较高时薄膜应变传感器线性度为0.243%;薄膜热电阻传感器ΔR/ΔT斜率为0.4529,线性度较好。By analyzing the influence of sputtering pressure on the resistance temperature coefficient of PdCr film and the influence of annealing condition on the resistivity of Pt film,the mask method was used to realize the graphic processing of strain film and thermal resistance film,and the high temperature silver paste sintering was used to realize the stable connection between the lead and the sensitive layer film.A design method of thin film sensor was established,which was composed of Ni-based alloy base band,Y2O3 transition layer,AlONAl2O3 composite insulation layer,PdCr strain sensitive layer/Pt thermal resistance sensitive layer and Al2O3 protective layer.The thin-film strain sensor and thin-film thermal resistance sensor were flexibly installed in the transmission bevel gear at the same time for testing.The results show that the linearity of the thin film strain sensor is 0.243%when the external stress is high.The slope of the thin-film thermal resistance sensorΔR/ΔT is 0.4529,and the linearity is good.

关 键 词：过渡层与复合绝缘层制备 敏感层制备及图形化 引线连接 柔性安装 

分 类 号：TB9[一般工业技术—计量学]