多层PZT陶瓷自热温度影响因素分析  

Analysis of Factors Affecting Self-Heating Temperature of Multilayer PZT Ceramics

作　　者：宜亚丽[1,2] 旷庆文 陈美宇 秦越 韩雪艳 褚祥诚 金贺荣[1,2] YI Yali;KUANG Qingwen;CHEN Meiyu;QIN Yue;HAN Xueyan;CHU Xiangcheng;JIN Herong(State Key Laboratory of Crane Technology,Yanshan University,Qinhuangdao 066004,China;School of Mechanical Engineering,Yanshan University,Qinhuangdao 066004,China;Engineering Training Center of Yanshan University,Qinhuangdao 066004,China;State Key Lab.of New Ceramics and Fine Processing,School of Materials Science and Engineering,Tsinghua University,Beijing 100084,China)

机构地区：[1]燕山大学起重机械关键技术全国重点实验室,河北秦皇岛066004 [2]燕山大学机械工程学院,河北秦皇岛066004 [3]燕山大学工程训练中心,河北秦皇岛066004 [4]清华大学材料学院新型陶瓷与精细工艺国家重点实验室,北京100084

出　　处：《压电与声光》2025年第1期121-128,共8页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(52475596)。

摘　　要：多层PZT陶瓷作为压电驱动器的核心组件,其压电性能受自热温度影响,在高交变电压作用下易发生失效。该文从交变电压特性、陶瓷多层结构角度对PZT陶瓷自热温度作用规律展开研究。首先基于扫描电镜下陶瓷断面结构形貌,建立了多层PZT陶瓷细观结构仿真模型;然后搭建了温度测量实验平台,开展陶瓷表面自热温度测量实验进行验证;最后分析了交变电压幅值、频率特性和陶瓷压电层、死层厚度对陶瓷表面自热温度的作用机理。结果表明,陶瓷表面自热温度与交变电压幅值、频率呈近似线性增长;自热温度极值分布在陶瓷表面中心区域和边缘区域,温度差值小于3℃;压电层越厚,陶瓷表面自热温度越低;表面自热温度随死层厚度的增加呈先降后增趋势,且在死层厚度约300μm时达到最低值。该结论为多层PZT陶瓷自热温度调控与工程应用提供了理论依据和实验基础。As the core component of piezoelectric actuators,the piezoelectric performance of multilayer PZT ceramics is affected by the self-heating temperature.In addition,multilayer PZT ceramics are prone to failure under strong alternating voltage.This study investigates the factors affecting the self-heating temperature from the perspective of alternating voltage characteristics and multilayer structure of PZT ceramics.First,based on the scanning electron microscope cross-sectional structure morphology,a fine-structure simulation model of multilayer PZT ceramics was established.Then,a temperature measurement experimental platform was set up to conduct self-heating temperature measurements on the ceramic surface for validation.Finally,the effects of alternating voltage amplitude,frequency characteristics,piezoelectric layer thickness,and dead layer thickness on the self-heating temperature of the ceramic surface were analyzed.The results indicate that 1)the self-heating temperature of the ceramic surface increases linearly with the alternating voltage amplitude and frequency;2)the extreme value of the self-heating temperature is distributed in the center and edge regions of the ceramic surface,and the difference in temperature is less than 3℃;3)the thicker the piezoelectric layer is,the lower the self-heating temperature of the ceramic surface is;and 4)the self-heating temperature of the surface decreases with the thickness of the dead layer and reaches its minimum when the thickness of the dead layer is approximately 300μm.This study provides a theoretical basis and experimental foundation for regulating the self-heating temperature in multilayer PZT ceramics and supporting engineering applications.

关 键 词：自热温度 交变电压 多层结构 热模拟 PZT陶瓷 

分 类 号：TN304[电子电信—物理电子学] TN384