Topological Design of Low Dielectric Ladder-like Polysilsesquioxane and Copolymers  

作　　者：Wen-Jie Fan Meng Xie Jin-Feng Tian Yan He Shuang Xia Wen-Xin Fu 

机构地区：[1]Key Laboratory of Science and Technology on High-Tech Polymer Materials,Institute of Chemistry,Chinese Academy of Sciences,Beijing 100190,China [2]University of Chinese Academy of Sciences,Beijing 100049,China [3]State Key Laboratory of Polymer Materials Engineering,Polymer Research Institute of Sichuan University,Chengdu 610065,China

出　　处：《Chinese Journal of Polymer Science》2025年第3期477-487,共11页高分子科学(英文版)

基　　金：financially supported by the National Natural Science Foundation of China(Nos.52373316,22075298,and52373020);the Beijing Municipal Natural Science Foundation(No.2212053)。

摘　　要：Low dielectric constant(low-k)materials are critical for advanced packaging in high-density microelectronic devices and high-frequency communication technologies.Ladder polysiloxanes,which are characterized by their unique double-chain structure and intrinsic microporosity,offer remarkable advantages in terms of thermal stability,oxidation resistance,and dielectric performance.However,structural defects in ladder polysiloxanes,such as cage-like and irregular oligomers,and their effects on dielectric properties remain underexplored.In this study,a series of ladder-like polysiloxanes(X-TMS)with diverse side groups weresynthesized via a one-step base-catalyzed method.The influence of the benzocyclobutene(BCB)side groups on the formation of regular ladder structures was systematically investigated.Notably,BCB incorporation disrupted the structural regularity,favoring the formation of cage-like and irregular topologies,which were extensively characterized using 29silicon nuclear magnetic resonance spectroscopy(^(29)Si-NMR),Fourier transform infrared spectroscopy(FTIR),gel permeation chromatography(GPC),and X-ray diffraction(XRD).These structural defects were beneficial for improving the hydrophobicity and thermal stability.Copolymerization of X-TMS with commercial DVS-BCB resins further enhanced the mechanical properties,with the elastic modulus increasing from 3.6 GPa to 4.4 GPa and water absorption reduced from 0.33 wt%to 0.06 wt%.This study establishes a clear correlation between topological structures and material properties.These findings not only advance the understanding of the structure-property relationships in ladder polysiloxanes but also provide a novel approach for designing high-performance interlayer dielectric materials for next-generation microelectronics.

关 键 词：Ladder polymer Topological structures POLYSILOXANES Low dielectric BENZOCYCLOBUTENE 

分 类 号：TB3[一般工业技术—材料科学与工程]