微间距气隙放电路径对击穿电压的影响  

Effect of Discharge Path on Breakdown Voltage with Micro-Spacing Air Gap

作　　者：马国凯 赵来军[2] 王国达 张昊 孙岩洲[2] MA Guokai;ZHAO Laijun;WANG Guoda;ZHANG Hao;SUN Yanzhou(State Grid Hebi Power Supply Company,Hebi Henan 458000,China;School of Electrical Engineering and Automation,Henan Polytechnic University,Jiaozuo Henan 454000,China)

机构地区：[1]国网河南省电力公司鹤壁供电公司,河南鹤壁458000 [2]河南理工大学电气工程与自动化学院,河南焦作454000

出　　处：《电子器件》2025年第1期142-147,共6页Chinese Journal of Electron Devices

基　　金：国家自然科学基金项目(11405044)。

摘　　要：为研究微米尺度下击穿电压曲线“平台期”出现的原因及其影响因素,在20μm~100μm的电极间距,1 kPa~100 kPa的气压范围内,设置三组不同电极进行气体放电实验并对结果进行分析。在不同电极曲率半径的条件下,随气压变化,击穿电压曲线偏离Paschen曲线,均出现“平台期”。“平台期”是带电粒子在电极边缘附近通过对路径的改变,从而满足最低击穿电压时的Pd_(min),且“平台期”范围受电极边缘曲率半径大小的影响。而将电极边缘进行绝缘处理后其击穿电压曲线与Paschen曲线一致,微米间距下击穿路径并非沿电极间最小间距。In order to study the causes and influencing factors of the“plateau period”of breakdown voltage curve at the micron scale,three groups of different electrodes are set up for gas discharge experiments within the range of 20μm-100μm electrode spacing and 1 kPa-100 kPa air pressure,and the results are analyzed.Under the conditions of different electrode curvature radii,the breakdown voltage curve deviates from Paschen curve with the change of air pressure,and there is a“plateau period”.The“plateau period”is the Pd_(min) when the charged particles meet the minimum breakdown voltage by changing the path near the electrode edge,and the“plateau period”range is affected by the radius of curvature of the electrode edge.However,the breakdown voltage curve of the electrode edge after insulation treatment is consistent with the Paschen curve,and the breakdown path is not along the minimum spacing between the electrodes at the micron spacing.

关 键 词：微米间隙 Paschen曲线 平台期 路径自调制 

分 类 号：TM154.3[电气工程—电工理论与新技术]