HL-3装置Bolometer系统金属膜电阻探测器的研制  

Development of metal film resistance detector of Bolometer in the HL-3 tokamak

作　　者：何宗钰慧 高金明[1] 郝广周 梁绍勇 才来中[1] HE Zong-yu-hui;GAO Jin-ming;HAO Guang-zhou;LIANG Shao-yong;CAI Lai-zhong(Southwestern Institute of Physics,Chengdu 610041)

机构地区：[1]核工业西南物理研究院,成都610041

出　　处：《核聚变与等离子体物理》2025年第1期13-18,共6页Nuclear Fusion and Plasma Physics

基　　金：国家重点研发计划(2018YFE0303101)。

摘　　要：为了满足HL-3托卡马克装置的辐射功率测量和二维辐射剖面反演的需求,设计了一套金属薄膜电阻式Bolometer系统及其探测器。介绍了系统视线的布局和探测器研制。探测器主要包含吸收薄膜、陶瓷底板、热敏电阻及不锈钢外壳。金属吸收薄膜采用金、镍2种材料以匹配装置放电的不同参数。陶瓷底板利用磁控溅射工艺确保了其绝缘和导热性能,提高了探测器的时间分辨率。热敏电阻通过电桥结构相连,平抑了环境温度造成的误差。电阻丝通过光刻技术刻蚀在氮化硅基片上,提高了探测器的灵敏度和测量范围。陶瓷电路板和无磁不锈钢外壳具备耐高温耐烘烤的能力。每个探测器集成4个测量通道,空间占用率低,便于安装在HL-3装置真空室内。探测器电源和信号采用弹簧针接引,可靠性强。测试结果显示,探测器电阻阻值均匀,能随温度线性变化。本系统未来能够为HL-3装置等离子体辐射功率测量提供良好的技术手段。To meet the requirements of radiation power measurement and two-dimensional radiation profile inversion for the HL-3 tokamak,a metal film resistance Bolometer system and its detectors were designed.The layout of the system's sightlines and the development of the detectors are described.The detectors mainly consist of an absorption film,a ceramic base plate,a thermistor and a stainless steel casing.The metal absorption films use gold and nickel to match the different parameters of the device discharges.The ceramic base plate is processed with magnetron sputtering to ensure its insulation and thermal conductivity,enhancing the time resolution of the detector.The thermistors are connected via a bridge structure to suppress errors caused by ambient temperature.The resistance wire is etched onto a silicon nitride substrate using photolithography techniques,which improves the detector's sensitivity and measurement range.The ceramic circuit board and the non-magnetic stainless steel casing are capable of withstanding high temperatures and baking.Each detector integrates four measurement channels,has a low space occupancy rate,and is easy to install inside the HL-3 vacuum chamber.The detector power and signal connections use spring-loaded pins for high reliability.The test results show that the detector resistance values are uniform and change linearly with temperature.This system will provide a reliable technical means for measuring plasma radiation power in the HL-3 tokamak in future.

关 键 词：等离子体诊断 金属膜电阻探测器 Bolometer系统 

分 类 号：O536[理学—等离子体物理]