飞秒激光加工不锈钢精密微孔工艺优化  

Process Optimization of Precision Micro-hole Machining of Stainless Steel with Femtosecond Laser

作　　者：刘云婷 张晶 张正浩 杨一明 张昆 孔高富 邱银 LIU Yunting;ZHANG jing;ZHANG Zhenghao;YANG Yiming;ZHANG Kun;KONG Gaofu;QIU Yin(Capital Aerospace Machinery Co.,Ltd.,Beijing 100076,China)

机构地区：[1]首都航天机械有限公司,北京100076

出　　处：《电加工与模具》2025年第S1期56-61,共6页Electromachining & Mould

摘　　要：针对航空航天和深空探测等行业的精密微小孔加工需求,研究了螺旋迂回旋切扫描方式的飞秒激光制孔技术在不锈钢材料加工中主要工艺参数对加工质量的影响规律,为可控锥面精密微小孔的加工提供合理的参数范围。研究表明,在结束半径角8°、12°左右加工的孔径最为稳定。调控结束半径至8.3°,在激光功率3~4 W、单层进给量6~10μm、离焦量0.2~0.4 mm的条件下加工的微小孔效果较好;调控结束半径至12.5°,在激光功率4~5 W、单层进给量8~12μm、离焦量0.2~0.4 mm的条件下加工的微小孔效果较好。In response to the precision micro-hole machining needs of industries such as aerospace and deep space exploration,the article investigates the influence of the main process parameters on the machining quality of stainless steel materials by femtosecond laser drilling technology with spiral twist cutting scanning method,which could provide a reasonable parameter range for the machining of controllable cone precision micro-holes.The result showed that the aperture is most stable when processed at a radius angle of around 8°and 12°.When the end radius adjusted to 8.3°,the effect of machining micro-holes is relatively outstanding under the conditions of laser power of 3~4 W,single layer feed rate of 6~10μm and defocus of 0.2~0.4 mm.When the end radius adjusted to 12.5°,the effect of machining micro-holes is relatively outstanding under the conditions of laser power of 4~5 W,single-layer feed rate of 8~12μm and defocus of 0.2~0.4 mm.

关 键 词：飞秒激光 微小孔加工 结束半径角 离焦量 

分 类 号：TG665[金属学及工艺—金属切削加工及机床]