A Miniaturized Wireless Micropump Enabled by Confined Acoustic Streaming  

作　　者：Rui You Qian Fan Zilun Wang Wenqiang Xing Yuchuan Wang Yi Song Xuexin Duan Rui You Yan Wang 

机构地区：[1]State Key Laboratory of Precision Measuring Technology&Instruments,Tianjin University,Tianjin 300072,China [2]Tianjin Eye Hospital,Tianjin Key Lab of Ophthalmology and Visual Science,Nankai University Affiliated Eye Hospital,Nankai University Eye Institute,Nankai University,Clinical College of Ophthalmology Tianjin Medical University,Tianjin Eye Institute,Tianjin 300020,China [3]School of Instrument Science and Opto-Electronics Engineering,Beijing Information Science and Technology University,Beijing 100192,China [4]Beijing Advanced Innovation Center for Integrated Circuits,Beijing 100084,China

出　　处：《Research》2024年第4期381-395,共15页研究(英文)

基　　金：the National Natural Science Foundation of China(NSFC No.62174119);the National Key R&D Program of China(2018YFE0118700);the 111 Project(B07014);the Foundation for Talent Scientists of Nanchang Institute for Micro-technology of Tianjin University,the Tianjin Key Medical Discipline(Specialty)Construction Project(TJYXZDXK-016A);the National Program on Key Research Project of China(2022YFC2404502);the National Natural Science Foundation of China(82271118);the Tianjin Science and Technology Project(21JCZDJC01190);the Tianjin Health Research Project(TJWJ2022XK036);the Key Project of Tianjin Eye Hospital(QF:YKYB2007).

摘　　要：Miniaturization of health care,biomedical,and chemical systems is highly desirable for developing pointof-care testing(POCT)technologies.In system miniaturization,micropumps represent one of the major bottlenecks due to their undesirable pumping performance at such small sizes.Here,we developed a microelectromechanical system fabricated acoustic micropump based on an ultrahigh-frequency bulk acoustic wave resonator.The concept of an inner-boundary-confined acoustic jet was introduced to facilitate unidirectional flow.Benefitting from the high resonant frequency and confined acoustic streaming,the micropump reaches 32.620 kPa/cm^(3)(pressure/size)and 11.800 ml/min∙cm^(3)(flow rate/size),showing a 2-order-of-magnitude improvement in the energy transduction efficiency compared with the existing acoustic micropumps.As a proof of concept,the micropump was constructed as a wearable and wirelessly powered integrated drug delivery system with a size of only 9×9×9 mm^(3)and a weight of 1.16 g.It was demonstrated for ocular disease treatment through animal experimentation and a human pilot test.With superior pumping performance,miniaturized pump size,ultralow power consumption,and complementary metal–oxide–semiconductor compatibility,we expect it to be readily applied to various POCT applications including clinical diagnosis,prognosis,and drug delivery systems.

关 键 词：POCT PUMP PUMPING 

分 类 号：R44[医药卫生—诊断学]