Design and validation of RLC equivalent circuit model based on long-wave infrared metamaterial absorber  

基于长波红外超材料吸收器的RLC等效电路模型设计及验证

作　　者：ZHAO Ji-Cong DANG Yan-Meng HOU Hai-Yang LIN Ye-Fan SUN Hai-Yan ZHANG Kun 赵继聪;党岩盟;侯海洋;林叶繁;孙海燕;张坤(南通大学微电子学院(集成电路学院),江苏南通226019;中国科学院上海技术物理研究所红外科学与技术全国重点实验室,上海200083)

机构地区：[1]School of Microelectronics and School of Integrated Circuits,Nantong University,Nantong 226019,China [2]State Key Laboratory of Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China

出　　处：《红外与毫米波学报》2025年第1期129-137,共9页Journal of Infrared and Millimeter Waves

基　　金：Supported by the National Natural Science Foundation of China(62174092);the Open Fund of State Key Laboratory of Infrared Physics(SITP-NLIST-ZD-2023-04);the Strategic Priority Research Program of the Chinese Academy of Sciences(XDB0580000)。

摘　　要：In this paper,we propose an RLC equivalent circuit model theory which can accurately predict the spectral response and resonance characteristics of metamaterial absorption structures,extend its design,and characterize the parameters of the model in detail.By employing this model,we conducted computations to characterize the response wavelength and bandwidth of variously sized metamaterial absorbers.A comparative analysis with Finite Difference Time Domain(FDTD)simulations demonstrated a remarkable level of consistency in the results.The designed absorbers were fabricated using micro-nano fabrication processes,and were experimentally tested to demonstrate absorption rates exceeding 90%at a wavelength of 9.28μm.The predicted results are then compared with test results.The comparison reveals good consistency in two aspects of the resonance responses,thereby confirming the rationality and accuracy of this model.提出一种能够准确预测超材料吸收结构光谱响应和共振特性的RLC等效电路模型理论,对其设计进行了扩展,同时详细表征了该模型中的参数。利用该模型,对不同尺寸超材料吸波材料的响应波长和带宽进行了计算。计算结果与有限差分时域(FDTD)模拟结果很好地吻合。所设计的吸收器采用微纳制造工艺制备,通过实验测试,在波长为9.28μm时,吸收率超过90%。将预测结果与测试结果进行对比,表明两者的共振响应具有较好的一致性,从而证实了该模型的合理性和准确性。

关 键 词：METAMATERIAL surface plasmons magnetic dipoles RLC circuit model 

分 类 号：TN213[电子电信—物理电子学] TN214