一种提升定点抛光实验中去除函数采集准确性的方法  

A method to improve the accuracy of the removal function collection in fixed-point polishing experiments

作　　者：黄林斌 林鑫 彭云峰 HUANG Linbin;LIN Xin;PENG Yunfeng(School of Aerospace Engineering,Xiamen University,Xiamen 361102,China;Shenzhen Research Institute of Xiamen University,Shenzhen 518000,China)

机构地区：[1]厦门大学航空航天学院,福建厦门361102 [2]厦门大学深圳研究院,广东深圳518000

出　　处：《厦门大学学报(自然科学版)》2025年第2期307-315,共9页Journal of Xiamen University:Natural Science

摘　　要：[目的]定点抛光实验中,实际采集的去除函数与名义去除函数之间存在误差.该误差在加工过程中被累积放大,严重影响加工精度与面形收敛效率.为获得准确的去除函数,提高加工精度和面形收敛效率,本研究以半刚性气囊工具头为研究对象,探究定点抛光中去除量误差产生的原因与提高采集去除函数准确性的方法.[方法]本研究分析了定点抛光实验中去除量误差产生的原因,并基于Preston方程建立了去除量误差的数学模型.此外,通过改进定点抛光实验对该误差进行修正.首先,通过定点抛光实验获得实际的去除量分布特征.接着,在相同工艺参数下,将驻留时间设置为0 s,提取定点抛光过程中的去除量误差并根据该误差修正实际的去除量分布特征,得到更准确的去除函数.最后,使用修正前和修正后的去除函数对K9玻璃进行对比抛光实验,验证本方法的有效性.[结果]使用修正后的去除函数进行修形抛光,K9玻璃的面形峰谷值由906.80 nm减小至374.62 nm,提升58.69%.均方根值由175.92 nm减小至47.46 nm,提升73.02%.[结论]本研究提出的优化方法显著提升了半刚性气囊抛光精度与面形收敛率.[Objective]In fixed-point polishing experiments,a discrepancy exists between the actual removal function collected and the nominal removal function.This error is amplified during the machining process,thus severely affecting machining accuracy and surface convergence rate.To obtain an accurate removal function and improve machining precision and surface convergence rate,we focus on semi-rigid bonnet tools to explore the causes of removal volume errors in fixed-point polishing and methods to enhance the accuracy of the removal function collection.[Methods]In this study,we analyze causes of removal volume errors in fixed-point polishing experiments and establish a mathematical model for these errors based on the Preston equation.Furthermore,the study has improved fixed-point polishing experiments to correct these errors by first obtaining actual removal volume distribution characteristics.Then,under the same process parameters,the dwell time is set to 0 seconds to extract the removal volume errors during the fixed-point polishing process and correct actual removal volume distribution characteristics based on these errors,resulting in a more accurate removal function.Finally,comparative polishing experiments on K9 glass using both pre-corrected and post-corrected removal functions are conducted to validate the effectiveness of this method.[Results]After corrective polishing with the revised removal function,the peak-to-valley value of the K9 glass surface is reduced from 906.80 nm to 374.62 nm,suggesting an improvement of 58.69%.Also,the root mean square value decreases from 175.92 nm to 47.46 nm,indicating an improvement of 73.02%.[Conclusion]The optimization method proposed in this study significantly enhances the precision and the surface convergence rate of semi-rigid bonnet polishing.

关 键 词：气囊抛光技术 半刚性气囊工具头 定点抛光 面形误差 去除函数 

分 类 号：TH16[机械工程—机械制造及自动化]