Manufacturing strategies for highly sensitive and self-powered piezoelectric and triboelectric tactile sensors  

作　　者：Hyosik Park Gerald Selasie Gbadam Simiao Niu Hanjun Ryu Ju-Hyuck Lee 

机构地区：[1]Department of Energy Science and Engineering,Daegu Gyeongbuk Institute of Science and Technology(DGIST),Daegu 42988,Republic of Korea [2]Department of Biomedical Engineering,Rutgers University,Piscataway,NJ 08854,United States of America [3]Department of Advanced Materials Engineering,Chung-Ang University,Anseong 17546,Republic of Korea [4]Department of Intelligence Energy and Industry,Chung-Ang University,Seoul 06974,Republic of Korea [5]Energy Science and Engineering Research Center,Daegu Gyeongbuk Institute of Science and Technology(DGIST),Daegu 42988,Republic of Korea

出　　处：《International Journal of Extreme Manufacturing》2025年第1期151-172,共22页极端制造(英文)

基　　金：supported by National Research Foundation of Korea(2022M3D1A2054488);Technology Innovation Program(20025736,Development of MICS SoC and platform for in-vivo implantable electroceutical device)funded by the Ministry of Trade,Industry&Energy(MOTIE,Korea)。

摘　　要：Piezoelectric and triboelectric effects are of growing interest for facilitating high-sensitivity and self-powered tactile sensor applications.The working principles of piezoelectric and triboelectric nanogenerators provide strategies for enhancing output voltage signals to achieve high sensitivity.Increasing the piezoelectric constant and surface triboelectric charge density are key factors in this enhancement.Methods such as annealing processes,doping techniques,grain orientation controls,crystallinity controls,and composite structures can effectively enhance the piezoelectric constant.For increasing triboelectric output,surface plasma treatment,charge injection,microstructuring,control of dielectric constant,and structural modification are effective methods.The fabrication methods present significant opportunities in tactile sensor applications.This review article summarizes the overall piezoelectric and triboelectric fabrication processes from materials to device aspects.It highlights applications in pressure,touch,bending,texture,distance,and material recognition sensors.The conclusion section addresses challenges and research opportunities,such as limited flexibility,stretchability,decoupling from multi-stimuli,multifunctional sensors,and data processing.

关 键 词：triboelectric PIEZOELECTRIC tactile sensor MANUFACTURING COMPOSITE 

分 类 号：TB3[一般工业技术—材料科学与工程]