四轴超精密加工机床静动态特性分析  

Design and analysis on static and dynamic characteristics of four-axis ultra-precision machining machine

作　　者：邓翠 吴东旭 王玉伟 索奇 朱生根 李云飞 DENG Cui;WU Dongxu;WANG Yuwei;SUO Qi;ZHU Shenggen;LI Yunfei(Genertec Machine Tool Engineering Research Institute Co.,Ltd.,Beijing 101300,CHN)

机构地区：[1]通用技术集团机床工程研究院有限公司,北京101300

出　　处：《制造技术与机床》2025年第4期20-27,共8页Manufacturing Technology & Machine Tool

基　　金：国家重点研发计划项目(2022YFB3402700)。

摘　　要：针对高端光学元件高效高表面质量的超精密加工需求,设计研发了一台四轴(XZBC)超精密加工机床。为验证机床设计性能,通过Ansys Workbench建立机床整机及关键功能部件有限元模型,并依次进行静力学、模态及谐响应仿真分析。获得了基于工况模态分析下机床整机、液体静压导轨及主轴的前6阶固有频率和模态振型,其中整机基础频率、液体静压导轨单元基础频率、主轴单元基础频率分别为102.24、0、5.76 Hz。为进一步掌握主轴核心关键部件的实际响应,在模态分析的基础上利用模态叠加法对主轴单元进行谐响应分析,主轴单元的共振敏感频率为288、294、387、405、414 Hz,变形位移在0.02μm以内。通过各频域范围的位移及应变响应曲线,获取敏感频率及相应位移响应,验证了实际工况下整机及关键功能部件结构设计的合理性,为超精密机床的结构优化奠定理论基础。In response to the demand for ultra-precision machining with high-efficiency and high-surface quality ultra-precision of high-end optical elements,a four-axis(XZBC)ultra-precision machine tool was developed.To validate the machine design performance,the finite element model of the whole machine and key functional components were established by Ansys Workbench,and then carry out static analysis,modal analysis and harmonic response analysis.The first six natural frequencies and modal shapes of the machine tool,hydrostatic guideway and spindle were obtained by the modal analysis of the working conditions,among which the base frequencies of the whole machine,hydrostatic guideway unit and spindle unit were 102.24,0 and 5.76 Hz respectively.To further master the actual response of the key components spindle,harmonic response analysis was performed on the spindle unit using the modal superposition method based on the modal analysis.The resonance-sensitive frequencies of the spindle unit were 288,294,387,405 and 414 Hz,and the deformation displacement is within 0.02μm.The sensitive frequencies and the corresponding displacement response are obtained by the frequency range of the displacement and strain response curves.It verifies the rationality of the machine tool and spindle structure design under the actual working condition,and lays the theoretical foundation for structural optimization of ultra-precision machine tools.

关 键 词：超精密加工 模态分析 谐响应分析 静动态特性 Ansys Workbench 

分 类 号：TG502[金属学及工艺—金属切削加工及机床]