侵入式平面型静电传感器结构设计与优化研究  

Structural Design and Optimization of Intrusive Planar Electrostatic Sensor

作　　者：史鑫 赵鹏 王小华 李健[3] SHI Xin;ZHAO Peng;WANG Xiao-hua;LI Jian(CHN Energy Group Shenwan Hefei Power Generation Co.,Ltd.,Hefei 231551,China;Suzhou TPRI Energy and Environmental Technology Co.,Ltd.,Suzhou 215153,China;National Engineering Research Center of Power Generation Control and Safety,School of Energy and Environment,Southeast University,Nanjing 210096,China)

机构地区：[1]国能神皖合肥发电有限责任公司,安徽合肥231551 [2]苏州西热节能环保技术有限公司,江苏苏州215153 [3]大型发电装备安全运行与智能测控国家工程研究中心、东南大学能源与环境学院,江苏南京210096

出　　处：《节能技术》2025年第1期71-76,共6页Energy Conservation Technology

基　　金：国家重点研发计划资助项目(2023YFB4102904)。

摘　　要：针对静电测速传感器结构、电极尺寸参数等因素影响检测电极感应信号,进而影响传感器灵敏度特性与颗粒流速测量精度的问题,本文以矩形结构流道内颗粒流速为测量对象,提出了一种侵入式平面型静电传感测速装置,分析了传感器结构与电极尺寸参数等对检测电极灵敏度特性曲线与互相关距离的影响规律。结果表明:保护电极对检测电极灵敏度特性曲线与互相关距离有较大影响,增设保护电极能够提高传感器测量准确性;保护电极宽度与检测电极宽度相同时,互相关距离与电极空间距离之间偏差最小;电极间隔越小,互相关距离与电极空间距离之间偏差越小;电极宽度越大,检测电极灵敏度曲线峰值与峰值间距单调越大,电极空间距离和互相关距离越大,两者之间的偏差随着电极宽度增加先减小后增加,当电极宽度均为3 cm时,静电互相关距离与电极中心间距的偏差值达到最小为1.08%。进行传感器设计时,应保持保护电极宽度与检测电极宽度相同,并采取较小的电极间隔。In view of the problem that the structure and size parameters of the electrostatic velocity measurement sensor affect the sensor sensitivity and the velocity measurement accuracy,this paper proposes an invasive planar electrostatic sensor for measuring the particle velocity in a rectangular structure flue gas flow channel.The influence of the sensor structural parameters on the sensor sensitivity and cross-correlation distance is analyzed.The results show that the protective electrodes have a great influence on the sensitivity characteristic curve and cross-correlation distance of the senso.Increasing the protective electrode size can improve the measurement accuracy of the sensor.When the width of the protection electrode is the same as the width of the detection electrode,the deviation between the cross-correlation distance and the electrode space distance is smallest.The smaller the electrode spacing,the smaller the deviation between the cross-correlation distance and the actual space distance.The larger the width of the protection electrode and the detection electrode,the larger the cross-correlation distance while the larger the electrode space distance and the sensor cross-correlation distance.The deviation between the cross-correlation distance and the central sensor distance decreases first and then increases with the increase of the electrode width.When the electrode width is 3 cm,the deviation value reaches the minimum 1.08%.When designing invasive planar electrostatic sensor,it is suggested to select the same width for both the guard electrode and the sensing electrode,and adopt a relative small electrode spacing.

关 键 词：静电传感器 侵入式平面型电极 结构优化 速度测量 灵敏度 互相关距离 

分 类 号：TN602[电子电信—电路与系统]