哈特曼传感器检测微透镜波前方法  

Method of detecting microlens wavefront by Hartmann sensor

作　　者：杨伟斌 王春艳[1] 张为国[2] 王金玉 夏良平 杜春雷 孙昊[1] YANG Weibin;WANG Chunyan;ZHANG Weiguo;WANG Jinyu;XIA Liangping;DU Chunlei;SUN Hao(School of Opto-Electronic Engineering,Changchun University of Science and Technology,Changchun 130022,China;Research Center for Micro and Nano Manufacturing and System Integration,Chongqing Institute of Green and Intelligent Technology,Chinese Academy of Sciences,Chongqing 400714,China;Key Laboratory of Micro-Nano Optoelectronic Devices and Intelligent Sensing System,Yangtze Normal University,Chongqing 408100,China;Zhuhai Mai Time Electronics Technology Co.,Ltd.,Zhuhai 519060,China)

机构地区：[1]长春理工大学光电工程学院,吉林长春130022 [2]中国科学院重庆绿色智能技术研究院,微纳制造与系统集成研究中心,重庆400714 [3]长江师范学院微纳光电器件与智能感知系统重点实验室,重庆408100 [4]珠海迈时光电科技有限公司,广东珠海519060

出　　处：《应用光学》2025年第2期380-387,共8页Journal of Applied Optics

基　　金：吉林省科技发展计划项目(20220201074GX);重庆市“博士直通车”科研项目(CSTB2022BSXM-JSX0011);重庆市科技局项目(CSTB2022NSCQ-LZX0056)。

摘　　要：随着微透镜的广泛应用,微透镜光学性能的快速检测是使用者和加工人员亟待解决的关键问题。提出利用哈特曼波前传感器来检测微透镜波前,从而快速表征其光学性能。为了验证该方法的可行性,设计了利用哈特曼传感器测量微透镜波前的总体方案,搭建了测量实验系统,并对测量的误差源进行了分析。结合实验方案,研究质心提取算法、Zernike多项式波前重构算法,保证光斑质心提取精度及波前重构精度,并分析了待测透镜孔径衍射对波前检测精度的影响。结合200μm的凸透镜进行波前检测实验,得到了其波前误差和初级像差信息,为微透镜光学性能的快速检测提供了一种全新的思路。With the wide application of microlens,the rapid detection of optical properties of microlens is a key problem to be solved urgently by users and processors.Hartmann wavefront sensor was used to detect the wavefront of microlens and to quickly characterize its optical properties.In order to verify the feasibility of this method,the overall scheme of measuring microlens wavefront with Hartmann sensor was designed,the measurement experiment system was set up,and the measurement error source was analyzed.Combined with the experimental scheme,the centroid extraction algorithm and the Zernike polynomial wavefront reconstruction algorithm were studied to ensure the centroid extraction accuracy and wavefront reconstruction accuracy of the spot,and the effect of aperture diffraction of the lens to be tested on the wavefront detection accuracy was analyzed.The wavefront error and primary aberration information of a 200μm convex lens were obtained,which provided a new idea for the rapid detection of optical properties of microlenses.

关 键 词：微透镜 哈特曼传感器 质心提取 波前重构 光学性能 

分 类 号：TN206[电子电信—物理电子学] TH74[机械工程—光学工程]