基于Fabry-Perot微腔结构的超低温环境光纤应变传感特性研究  

Research on ultra-low temperature fiber strain sensing characteristics based on Fabry-Perot micro-cavity structure

作　　者：陈佳莹 李邵德 何巍[1,2] CHEN Jiaying;LI Shaode;HE Wei(Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument,Beijing Information Science and Technology University,Beijing 100192,Beijing 100192,China;Beijing Laboratory of Optical Fiber Sensing and Systems,Beijing Information Science and Technology University,Beijing 100192,China)

机构地区：[1]北京信息科技大学光电测试技术及仪器教育部重点实验室,北京100192 [2]北京信息科技大学光纤传感与系统北京实验室,北京100192

出　　处：《光电子.激光》2025年第4期344-351,共8页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金(52105540);河南省市场监督管理局科技计划项目(2022SJ41)资助项目。

摘　　要：本文提出了一种基于氢氟酸(hydrofluoric acid,HF)化学腐蚀法制备光纤法布里-珀罗(Fabry-Perot,F-P)微腔结构的超低温液氮环境光纤应变传感特性研究。采用浓度为20%的HF溶液腐蚀单模光纤端面15 min得到凹槽结构,将腐蚀端与另一端面切平的单模光纤进行熔接形成F-P微腔,F-P反射谱对比度为7.98 dB,自由光谱范围(free spectrum range,FSR)为17.8 nm。实验中,将光纤F-P传感器粘贴在等强度梁上并放置于液氮(-196℃)环境,应变测试范围为70—630με,在施加应变过程中,F-P反射谱波长向短波方向漂移4.21 nm,灵敏度为-7.17 pm/με,拟合度为99.928%;在卸载应变过程中,F-P反射谱波长向长波方向漂移4.33 nm,灵敏度为7.34 pm/με,拟合度为99.923%。通过对超低温应变响应特性实验进行滞后性分析得知施加-卸载应变波长漂移最大偏差为0.17 nm,证明所设计的传感器具有稳定性与可靠性。In this paper,a strain sensing characteristic of fiber Fabry-Perot(F-P)micro-cavity fabricated by hydrofluoric acid(HF)chemical etching method in ultra-low temperature liquid nitrogen environment was presented.The groove structure was obtained by corroding the end face of the single-mode fiber with a concentration of 20%HF solution for 15 min,and the corroded end was welded with the single-mode fiber with the other end face cutting flat to form flat an F-P micro-cavity.The F-P reflection spectrum contrast was 7.98 dB and the free spectrum range(FSR)was 17.8 nm.The fiber F-P sensor was pasted on the equal strength girder and placed in liquid nitrogen(-196℃)environment,and the strain range was 70—630μεin the experiment.The wavelength of F-P reflection spectrum drifted 4.21 nm in the short-wave direction,the strain sensitivity is-7.17 pm/μεand the R-squared is 99.928%during the applied strain.The wavelength of F-P reflection spectrum drifted 4.33 nm in the long-wave direction,the strain sensitivity is 7.34 pm/μεand the R-squared is 99.923%during the unloading strain.Through the hysteresis analysis of the ultra-low temperature strain response characteristic experiment,it is found that the maximum deviation of applied-unloading strain wavelength drift is 0.17 nm,which proves that the designed sensor has stability and reliability.

关 键 词：光纤传感 法布里-珀罗(F-P) 氢氟酸(HF) 液氮 应变 

分 类 号：TN253[电子电信—物理电子学]