环状电极压电作动器的制备与位移检测  

Preparation and displacement detection of piezoelectric actuators for ring electrodes

作　　者：李海吉 刘永刚[1] 王亚腾 杜哲 LI Haiji;LIU Yonggang;WANG Yateng;DU Zhe(School of Mechatronics Engineering,Henan University of Science and Technology,Luoyang 471003,China)

机构地区：[1]河南科技大学机电工程学院,河南洛阳471003

出　　处：《传感器与微系统》2025年第4期110-113,共4页Transducer and Microsystem Technologies

基　　金：河南省重点攻关基金资助项目(212102210065);河南省产学研合作基金资助项目(182107000012)。

摘　　要：本文提出了一种基于交叉指型排列分布的环状电极压电作动器,分析了其电极结构与驱动原理,采用丝网印刷法对环状电极压电作动器的电极进行制作,并进行极化,完成对待测元件的制备。搭建了位移检测平台,对待测元件的静态性能进行检测。试验结果表明:激励信号波形对直径为?25 mm、厚度为2 mm、电极宽度为0.8 mm、分支电极中心距为1.6 mm的环状电极压电作动器的峰值位移影响不大。当激励频率从0.2 Hz逐渐增加到1.0 Hz时,其位移峰值从1.5μm降低到了1.3μm。激励电压对该元件的峰值位移影响比较大,当激励电压幅值为50 V时,其峰值位移只有0.4μm;当激励电压幅值为200 V时,其峰值位移达到了1.5μm,是相同结构的传统电极压电作动器的2.37倍,该驱动器具有较好的位移性能。A ring electrode piezoelectric actuator based on cross-finger arrangement distribution is proposed,the electrode structure and driving principle are analyzed,and the electrode of the ring electrode piezoelectric actuator is fabricated by screen printing,and the preparation of the test element is completed by polarization.A displacement detection platform is built up to test the static performance of the element under test.The test results show that the excitation signal waveform has little effect on the peak displacement of the piezoelectric actuator of ring electrodes with diameter of25 mm,thickness of 2 mm,electrode width of 0.8 mm and center distance of branch electrode of 1.6 mm.When the excitation frequency is gradually increased from 0.2 Hz to 1.0 Hz,the peak displacement is reduced from 1.5μm to 1.3μm.Excitation voltage has great influence on peak displacement of the component.When the excitation voltage amplitude is 50 V,its peak displacement is only 0.4μm;when the excitation voltage amplitude is 200 V,its peak displacement reaches 1.5μm,which is 2.37 times that of the traditional electrode piezoelectric actuator of the same structure,and the driver has better displacement performance.

关 键 词：环状电极 制备 压电作动器 激励信号 径向位移 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN384[自动化与计算机技术—控制科学与工程]