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作 者:张传恒 郭海超 Zhang Chuanheng;Guo Haichao(Nanjing Membrane Material Industry Technology Research Institute Co.,Ltd.,Nanjing Jiangsu211800,China)
机构地区:[1]南京膜材料产业技术研究院有限公司,江苏南京211800
出 处:《山西化工》2025年第3期121-123,共3页Shanxi Chemical Industry
摘 要:在光刻胶生产中三乙胺作为催化剂和缚酸剂被广泛使用,反应生成三乙胺盐酸盐。以9000t/a三乙胺盐酸盐废溶液回收项目为例,与双塔精馏工艺进行比较,结果显示采用精馏-透水型分子筛膜工艺年运行费用降低约35%,回收率提高约1%,流程简单,操作方便。装置投产运行后,检测指标优于设计值,节能降耗符合预期要求。Friethylamine is used as catalyst and acid binding agent in optical resist production,produce hazardous waste triethylamine hydrochloride.The result showed that,compared with the two-tower distillation process,for a triethylamine hydrochloride purification plant with capacity of 9000 tons/a,the annual operating costs of distillation-zeolite membrane process reduced about 35%,the recovery rate is increased by about 1%,the process is simple and the operation is convenient.After the device is put into operation,the detection index is better than the design value,and the energy saving and consumption reduction meet the expected requirements.
分 类 号:TN405[电子电信—微电子学与固体电子学] TQ57[化学工程—精细化工]
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