基于平行耦合结构的薄膜微带滤波器设计  

Design of Thin Film Micro Strip Filters based on Parallel Coupled Structure

作　　者：张志悦 姬五胜[2,3] 范佰杰 段英丽 张俊茜 王君 ZHANG Zhiyue;JI Wusheng;FAN Baijie;DUAN Yingli;ZHANG Junxi;WANG Jun(Beijing Aerospace Micro-electronics Technology Co.,Ltd.,Beijing 100854,China;Institute of Antenna and Microwave Techniques,Tianjin University of Technology and Education,Tianjin 300222,China)

机构地区：[1]北京航天微电科技有限公司,北京100854 [2]天津职业技术师范大学电子工程学院,天津300222 [3]天津职业技术师范大学天线与微波技术研究所,天津300222

出　　处：《新技术新工艺》2025年第3期37-42,共6页New Technology & New Process

摘　　要：在信息技术快速发展的今天,薄膜微带滤波器作为通信系统中的选频器件,越来越要求向高频小体积低插损的方向发展。通过选择恰当的滤波器模型,提取参数和初值,得到理想的滤波器响应曲线。应用ADS和HFSS两种仿真软件对照设计,通过在Al_(2)O_(3)基片上采用平行耦合微带线结构,实现了一款毫米波薄膜微带平行耦合滤波器。通过调节耦合间距可以有效调节滤波器带宽,通过调节谐振器枝节长度可以有效调节滤波器工作频率。滤波器尺寸为6.5 mm×4.7 mm×0.39 mm,标称频率为38 GHz,相对带宽16%,中心插损小于2,阻带抑制≥20 dB@44 GHz、≥10 dB@32 GHz,测量结果与仿真结果基本吻合。解决了高频信号滤波的问题,在高频通信系统、卫星通信、雷达系统等领域具有广阔的应用前景。具备了小型化、低插损、高频滤波器的设计能力。In today’s era of rapid development of information technology,the thin-film micro strip filters,as frequency-selective devices in communication systems,were increasingly required to develop towards the direction of high frequency,small size and low insertion loss.By selecting appropriate filter models and extracting parameters and initial values,an ideal filter response curve was obtained.By using two kinds of simulation software,which were ADS and HFSS,for comparative design,a millimeter-wave micro strip parallel-coupled thin film filter was realized by adopting the parallel-coupled micro strip line structure on the Al_(2)O_(3) substrate.The bandwidth was adjusted by adjusting the coupling spacing,and the operating frequency was adjusted by adjusting the length of the resonant stub.The size of the filter was 6.5 mm×4.7 mm×0.39 mm,with a nominal frequency of 38 GHz,a relative bandwidth of 16%,a central insertion loss of less than 2,and a stop band suppression of≥20 dB@44 GHz and≥10 dB@32 GHz.The measurement results were basically consistent with the simulation results.It solved the problem of high-frequency signal filtering and has had broad application prospects in fields such as high-frequency communication systems,satellite communications,radar systems,and so on.It had the design capability of miniaturized,low insertion loss and high-frequency filters.

关 键 词：薄膜微带滤波器 平行耦合结构 HFSS ADS Al_(2)O_(3)基片 毫米波 

分 类 号：TN713.5[电子电信—电路与系统] TH162[机械工程—机械制造及自动化]