二维CMUT阵列成像系统的低冗余设计:一种新的阵列配置模式  

Low Redundancy Design for Two-Dimensional Capacitive Micromachined Ultrasonic Transducer Array Imaging System:a New Array Configuration Mode

作　　者：张甜 宋金沙 乔冰琴[1] 高丹 王智豪 邵星灵[2] Zhang Tian;Song Jinsha;Qiao Bingqin;Gao Dan;Wang Zhihao;Shao Xingling(Big Data College,Shanxi Finance&Taxation College,Taiyuan 030024,China;State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China)

机构地区：[1]山西省财政税务专科学校大数据学院,太原030024 [2]中北大学省部共建动态测试技术国家重点实验室,太原030051

出　　处：《微纳电子技术》2025年第4期140-151,共12页Micronanoelectronic Technology

基　　金：国家自然科学基金国家重大科研仪器研制项目(61927807);中央引导地方科技发展资金项目(YDZJSX2022A062);山西省高等学校科技创新计划项目(2023L533)。

摘　　要：在基于微机电系统(MEMS)的超声换能器研究中,经典相控阵(CPA)配置模式硬件系统复杂,经典合成孔径(CSA)配置模式成像效果较差。为了避免这些问题,研究了低冗余的二维电容式微机械超声换能器(CMUT)阵列配置模式。提出了三种新的阵列配置模式,即“+”字型发射全阵列接收(PF)、“X”型发射全阵列接收(XF)和边界型发射全阵列接收(BF)。首先,计算这五种阵列配置模式的有效孔径。从对比结果可以看出,XF的有效孔径最接近CPA的理想有效孔径。然后,对五种阵列配置模式的合成波束进行对比。阵列定量结果表明,XF的主瓣宽度和第一旁瓣高度分别为9.24°(-10 dB)和-21.33 dB,CPA的主瓣宽度和第一旁瓣高度分别为8.02°(-10 dB)和-26.29 dB。此外,为了验证研究结果,进行点目标仿真成像。在PF、XF和BF三种阵列配置模式中,XF以最少的发射阵元数量实现了与CPA几乎相同的成像效果。可以得出,XF阵列配置模式可以降低硬件系统的复杂性,同时保证成像质量。该研究成果为CMUT阵列三维实时成像提供了理论依据。In the study of ultrasonic transducer based on the micro-electromechanical system(MEMS),the hardware system of the classical phased array(CPA)configuration mode is complicate,and the imaging effect of the classical synthetic aperture(CSA)configuration mode is poor.In order to avoid these problems,the low redundancy two-dimensional capacitive micromachined ultrasonic transducer(CMUT)array configuration modes were studied.Three new array configuration modes were proposed,i.e.plus shape transmitter-full receiver(PF),X shape transmitter-full receiver(XF)and boundary transmitter-full receiver(BF).Firstly,the effective apertures of these five array configuration modes were calculated.From the comparison results,it can be seen that the effective aperture of XF is closest to the ideal effective aperture of CPA.Then the synthetic beams of five array configuration modes were compared.The quantitative results of array show that the main lobe width and the first side lobe height of XF are 9.24°(-10 dB)and-21.33 dB,those of CPA are 8.02°(-10 dB)and-26.29 dB,respectively.Moreover,in order to verify the research results,point target simulation imaging was performed.Among the three array configuration modes of PF,XF and BF,XF achieves almost the same imaging effect as the CPA with the least number of transmitting array elements.It is concluded that the XF array configuration mode can reduce the hardware system complexity and ensure the imaging quality.The research results provide the theoretical basis for the CMUT array three-dimensional real-time imaging.

关 键 词：二维阵列 电容式微机械超声换能器(CMUT) 有效孔径 合成波束 超声成像 

分 类 号：TN64[电子电信—电路与系统] TB552[理学—物理]