时序优化的瞬态热反射成像测温技术  

Timing-Optimized Transient Thermoreflectance Imaging for Temperature Measurement Technology

作　　者：夏力 商娅娜[1] 陈娜[1] 刘书朋[1] 刘勇[1] 庞拂飞[1] 王廷云[1] Xia Li;Shang Yana;Chen Na;Liu Shupeng;Liu Yong;Pang Fufei;Wang Tingyun(School of Communication and Information Engineering,Shanghai University,Shanghai 200444,China)

机构地区：[1]上海大学通信与信息工程学院,上海200444

出　　处：《半导体技术》2025年第4期385-392,共8页Semiconductor Technology

基　　金：国家自然科学基金(62175142);高等学校学科创新引智计划(111计划,D20031)。

摘　　要：为消除光源波动对热反射测量的干扰,提出一种时序优化的瞬态热反射成像测温方法。该方法在触发光源信号与激励信号之间交替实现两者的同步与延迟,从而实现瞬态热反射成像。为验证该方法,使用尺寸小、热导率高的硅芯石英包层光纤作为样品,得到硅芯在一个温度变化周期内的反射率变化与平均反射率的比值(ΔR/R_(0))为-5.98×10^(-4),而相同测量时间内光源波动导致的该比值为-2.17×10^(-2),证实了该方法能够减小光源波动的影响。并对硅芯进行光热瞬态测温实验验证,动态描绘硅芯在激光脉冲作用下的升温过程,得到其温度变化在120 ms时刻达到最大值1℃,时间分辨率为20 ms。A temperature measurement method based on timing-optimized transient thermo-reflectance imaging was proposed to eliminate the interference of light source fluctuation on thermo-reflectance measurement.The method alternates between the triggering light source signal and the excitation signal to achieve the synchronization and delay of the two,thus realizing transient thermoreflectance imaging.To validate the method,a silicon core silica cladding fiber with small size and high thermal conductivity was used as the sample,and the ratio of the change in reflectivity to the average reflectivity of the silicon core(ΔR/R_(0))in one temperature change cycle was obtained to be-5.98×10^(-4),while the ratio due to the fluctuation of the light source within the same measurement time was-2.17×10^(-2),veri-fying that the method could reduce the influence of the fluctuation of the light source.Besides,the photothermal transient temperature measurement of the silicon core was experimentally verified to dynamically depict the heating process of the silicon core under the action of the laser pulse.It is obtained that the temperature change reaches a maximum value of 1℃at 120 ms with a time resolution of 20 ms.

关 键 词：瞬态热反射成像 反射率 光源波动 时序优化 硅芯石英包层光纤 

分 类 号：TN29[电子电信—物理电子学]