Using light to image millimeter wave based on stacked meta-MEMS chip  

作　　者：Han Wang Zhigang Wang Cheng Gong Xinyu Li Tiansheng Cui Huiqi Jiang Minghui Deng Bo Yan Weiwei Liu 

机构地区：[1]Institute of Modern Optics,Nankai University,Tianjin Key Laboratory of Microscale Optical Information Science and Technology,Tianjin 300350,China [2]School of Electronic Science and Engineering,University of Electronic Science and Technology of China,Chengdu 611731,China

出　　处：《Light(Science & Applications)》2025年第2期521-530,共10页光(科学与应用)(英文版)

摘　　要：A stacked metamaterial MEMS(meta-MEMS)chip is proposed,which can perfectly absorb electromagnetic waves,convert them into mechanical energy,drive movement of the optical micro-reflectors array,and detect millimeter waves.It is equivalent to using visible light to image a millimeter wave.The meta-MEMS adopts the design of upper and lower chip separation and then stacking to achieve the"dielectric-resonant-air-ground"structure,reduce the thickness of the metamaterial and MEMS structures,and improve the performance of millimeter wave imaging.For verification,we designed and prepared a 94 GHz meta-MEMS focal plane array chip,in which the sum of the thickness of the metamaterial and MEMS structures is only 1/2500 wavelength,the pixel size is less than 1/3 wavelength,but the absorption rate is as high as 99.8%.Moreover,a light readout module was constructed to test the millimeter wave imaging performance.The results show that the response speed can reach 144 Hz and the lens-less imaging resolution is 1.5mm.

关 键 词：detect millimeter wavesit metamaterial mems structuresand millimeter wave imaging image millimeter wavethe upper lower chip separation visible light absorb electromagnetic wavesconvert stacked metamaterial MEMS chip 

分 类 号：TN29[电子电信—物理电子学]