High-energy, high-peak-power, sub-nanosecond, spatial super-Gaussian 177 nm vacuum ultraviolet laser  

作　　者：Ning Wen Tian-Hao Lv Nan Zong Hong-Wei Gao Yong Bo Qin-Jun Peng Da-Fu Cui Zu-Yan Xu Xiao-Yang Wang Li-Juan Liu Ru-Kang Li Nan Wang Xue-Chun Lin 

机构地区：[1]Key Laboratory of Solid-State Laser,Technical Institute of Physics and Chemistry,Chinese Academy of Sciences,Beijing,China [2]Key Laboratory of Functional Crystal and Laser Technology,Technical Institute of Physics and Chemistry,Chinese Academy of Sciences,Beijing,China [3]Laboratory of All-Solid-State Light Source,Institute of Semiconductors,Chinese Academy of Sciences,Beijing,China [4]Institute of Optical Physics and Engineering Technology,Qilu Zhongke,Jinan,China [5]University of Chinese Academy of Sciences,Beijing,China

出　　处：《High Power Laser Science and Engineering》2024年第6期65-70,共6页高功率激光科学与工程(英文版)

基　　金：supported by the National Key Research and Development Program of China(No.2023YFB3610601);the International Partnership Program for Grand Challenges of the Chinese Academy of Sciences(No.174GJHZ2022016GC);the National Special Program for High-level Talents Science and Technology(No.SQ2022RA24910010)

摘　　要：A high-energy pulsed vacuum ultraviolet(VUV) solid-state laser at 177 nm with high peak power by the sixth harmonic of a neodymium-doped yttrium aluminum garnet(Nd:YAG) amplifier in a KBe_(2)BO_(3)F_(2) prism-coupled device was demonstrated. The ultraviolet(UV) pump laser is a 352 ps pulsed, spatial top-hat super-Gaussian beam at 355 nm.A high energy of a 7.12 mJ VUV laser at 177 nm is obtained with a pulse width of 255 ps, indicating a peak power of 28 MW, and the conversion efficiency is 9.42% from 355 to 177 nm. The measured results fitted well with the theoretical prediction. It is the highest pulse energy and highest peak power ever reported in the VUV range for any solid-state lasers.The high-energy, high-peak-power, and high-spatial-uniformity VUV laser is of great interest for ultra-fine machining and particle-size measurements using UV in-line Fraunhofer holography diagnostics.

关 键 词：high pulse energy KBe_(2)BO_(3)F_(2)prism-coupled device spatial super-Gaussian beam vacuum ultraviolet 

分 类 号：TN248[电子电信—物理电子学]