高频薄膜体声波滤波器设计方法  

Method of high frequency FBAR filter design

作　　者：赵睿 刘莹玉 杨宇军[1] 吴道伟 ZHAO Rui;LIU Yingyu;YANG Yujun;WU Daowei(Xi’an Microelectronics Technology Institute,Xi’an 710065,China)

机构地区：[1]西安微电子技术研究所,陕西西安710065

出　　处：《现代电子技术》2025年第8期25-29,共5页Modern Electronics Technique

基　　金：国家重点研发计划项目(2023YFB4404105)。

摘　　要：针对无线通信系统对高频化和集成化滤波器的需求,提出一种高频薄膜体声波滤波器设计方法。基于空腔型薄膜体声波谐振器(FBAR)结构,在空气腔上方建立有效压电复合薄膜结构模型,通过COMSOL Multiphysics仿真分析FBAR各层结构对频率特性的影响。结果显示,电极和压电层厚度显著影响谐振器性能,支撑层在高频下对频率偏移也有显著影响。通过多物理场仿真得到谐振器在6~9 GHz的阻抗特性并提取模型参数;然后基于先进设计系统(ADS)电路仿真软件搭建了谐振器的MBVD等效电路模型,通过场-路拟合修正了模型中的电路参数;再将修正后的MBVD电路模型封装为谐振器模块,用于后续滤波器的快速设计。采用封装好的谐振器模块搭建一阶滤波器电路,分析不同滤波器结构的优点,为高频FBAR滤波器的设计和优化提供了理论支持。A design method of high-frequency film bulk acoustic resonator(FBAR)filter is proposed to meet the requirements of high-frequency and integrated filters in wireless communication systems.Based on a cavity-type FBAR structure,an effective piezoelectric composite film model above the air cavity is established.The impact of various FBAR layer structures on frequency characteristics is analyzed by means of COMSOL Multiphysics simulations.The results show that the thickness of the electrodes and piezoelectric layers can significantly affect the resonator's performance,and the support layer has a notable impact on frequency shift at high frequencies.The impedance characteristics of the resonator in the 6-9 GHz are obtained by means of multi-physics simulations.An modified butteruorth-van dyke(MBVD)equivalent circuit model of the resonator is constructed based on advanced design system(ADS)circuit simulation software.The circuit parameters in the model are modified by field-path fitting,and the modified MBVD circuit model is packaged as a resonator module for the rapid design of subsequent filters.A first-order filter circuit is built by means of the encapsulated resonator module,and the advantages of different filter structures are analyzed,providing theoretical support for the design and optimization of high-frequency FBAR filter.

关 键 词：薄膜体声波谐振器 高频滤波器 多物理场仿真 等效电路模型 先进设计系统 MBVD 

分 类 号：TN713-34[电子电信—电路与系统]