基于双光梳的精密离心机动态半径外基准测量  

Dual-comb based dynamic radius external reference measurement of precision centrifuge

作　　者：周思宇 马宇轩 贺栋 张春京 汤莉[3,4] 刘欣 王姗姗[5,6] 吴冠豪 ZHOU Siyu;MA Yuxuan;HE Dong;ZHANG Chunjing;TANG Li;LIU Xin;WANG Shanshan;WU Guanhao(State Key Laboratory of Precision Measurement,Department of Precision Instrument,Tsinghua University,Beijing 100084,China;Guangwei(Guangdong)Technology Co.,Ltd.,Foshan 528200,China;Laboratory of Science and Technology on Ultra-precision Aerospace Control Instrument,Beijing 100039,China;Beijing Institute of Aerospace Control Devices,Beijing 100039,China;School of Optics and Photonics,Beijing Institute of Technology,Beijing 100081,China;National Key Laboratory on Near-Surface Detection,Beijing 100072,China)

机构地区：[1]清华大学精密仪器系精密测试技术及仪器全国重点实验室,北京100084 [2]光维(广东)科技有限公司,广东佛山528200 [3]超精密航天控制仪器技术实验室,北京100039 [4]北京航天控制仪器研究所,北京100039 [5]北京理工大学光电学院,北京100081 [6]近地面探测全国重点实验室,北京100072

出　　处：《光学精密工程》2025年第3期349-358,共10页Optics and Precision Engineering

基　　金：基础研究项目群(No.514010209-303);国家自然科学基金资助项目(No.52105555,No.52327805,No.62227822)。

摘　　要：为实现对精密离心机动态半径的精准测量,基于双光梳测距技术的高测速、高精度、绝对测距优势,结合柱面镜与会聚光路组成的空间光学布局,建立了离心机动态半径外基准测量系统。介绍了基于双光梳测距的外基准测量装置构成及其工作原理,分析了柱面镜靶标曲率半径误差与装调误差对动态半径测量精度的影响,并提出互补偿误差修正方法。然后,搭建实验系统对精密离心机在不同加速度下的动态半径进行了实时测量,评估了静态测量精度和动态测量精度。最后,分析了测量误差的来源并提出了系统优化方案。实验结果表明:系统可有效测量出加速度在0g~15g内的动态半径变化量。在2 kHz的重频差下进行20次滑动平均,动态测量精度优于0.56μm,动态半径最大值为204.90μm,满足精密离心机动态半径的高速、高精度测量要求,可用于提升离心机加速度标定精度。To achieve precise measurement of the dynamic radius of a precision centrifuge,an external ref⁃erence measurement system was established utilizing dual-comb ranging technology.This approach capi⁃talizes on the advantages of high speed,exceptional precision,and absolute distance measurement,and in⁃corporates a spatial optical configuration featuring a cylindrical mirror and focusing path.Initially,the structure and principles underlying the external reference measuring device based on dual-comb ranging are presented.Subsequently,an analysis is conducted regarding the influence of curvature radius and align⁃ment errors of the cylindrical mirror target on the precision of dynamic radius measurements,accompanied by the proposal of a method for mutual compensation error correction.An experimental system has been constructed to assess the dynamic radius of the precision centrifuge across various acceleration levels.Both static and dynamic measurement precisions of the system are evaluated,and sources of measurement er⁃rors are identified alongside a proposed system optimization plan.Experimental results demonstrate that the system effectively measures dynamic radius variations under accelerations ranging from 0g to 15g.With 20 sliding averages at a repetition frequency difference of 2 kHz,the dynamic measurement accuracy exceeds 0.56μm,with a maximum dynamic radius recorded at 204.90μm.This methodology satisfies the stringent requirements for high-speed and high-precision dynamic radius measurements,thereby en⁃hancing the accuracy of centrifuge acceleration calibration.

关 键 词：绝对测距 精密离心机 动态半径 外基准 双光梳 

分 类 号：TH741[机械工程—光学工程]