真空吸附装夹对镜片面形调控的影响  

Influence of vacuum adsorption mounting on adjustment of lens surface shape

作　　者：王茜 姚鹏[1,2] 白家荣 刘祥[1,2] 李丰国 褚东凯 侯士杰 魏宗磊 WANG Xi;YAO Peng;BAI Jiarong;LIU Xiang;LI Fengguo;CHU Dongkai;HOU Shijie;WEI Zonglei(Center for Advanced Jet Engineering Technologies(CaJET),School of Mechanical Engineering,Shandong University,Jinan 250061,Chain;Key Laboratory of High Efficiency and Clean Mechanical Manufacture of the Ministry of Education,Jinan 250061,Chain;GoerTek Inc.,Weifang 261061,Chain)

机构地区：[1]山东大学机械工程学院先进射流工程技术研究中心,山东济南250061 [2]高效洁净机械制造教育部重点实验室,山东济南250061 [3]歌尔股份有限公司,山东潍坊261061

出　　处：《光学精密工程》2025年第3期416-426,共11页Optics and Precision Engineering

基　　金：国家重点研发计划项目(No.2023YFC2413301);山东省重大科技创新工程项目(No.2023CXGC010207)。

摘　　要：真空吸附装夹可以使镜片受力均匀,减少表面划伤,广泛应用于光机系统加工装配领域。为了研究真空吸附对薄平面镜片面形的影响,基于圆周简支平板变形理论和薄板理论分析镜片与夹具间不同接触状态和不同真空度对镜片变形的影响规律。建立流固耦合模型分析不同负压条件下对镜片面形产生的影响,验证真空吸附调控镜片面形方法的可行性。最后,通过吸附装夹实验分析镜片在负压前后的面形变化。实验结果表明:负压吸附前后,镜片吸附面的面形误差由10μm内降低至7μm内;镜片与夹具之间的间隙由9μm降低至4μm以内,最小值为0.8μm。负压吸附使得镜片吸附面面形更加贴近夹具面形,验证了真空吸附调控镜片面形方法的有效性。本文提出的真空吸附装夹调控镜片面形以提高镜片加工和装配精度的方法,可有效降低镜片初始面形误差对光机系统的影响。Vacuum adsorption clamping ensures a uniform distribution of force on the lens,mitigates the occurrence of surface scratches,and is widely utilized in the processing and assembly of optical machine systems.This study examines the impact of vacuum adsorption on the surface morphology of thin plane lenses.Initially,the theory of circumferentially simply supported flat plate deformation,in conjunction with thin plate theory,is applied to analyze how various contact states between the lens and fixture,as well as differing vacuum levels,influence lens deformation.Subsequently,a fluid-solid coupling model is established to investigate the effects of various negative pressure conditions on lens surface geometry,thereby validating the feasibility of employing vacuum adsorption to regulate lens shape.Finally,adsorp⁃tion clamping experiments are conducted to assess changes in lens morphology before and after vacuum ap⁃plication.The findings reveal a reduction in the error of the lens adsorption surface shape from 10μm to 7μm,while the gap between the lens and fixture decreased from 9μm to 4μm,reaching a minimum of 0.8μm.In conclusion,negative pressure adsorption enhances the conformity of the lens adsorption surface to the fixture surface,thereby substantiating the efficacy of vacuum adsorption as a method for regulating lens surface shape.The proposed vacuum adsorption clamping technique not only improves the precision of lens processing and assembly but also effectively minimizes the impact of initial surface shape errors on the optical system.

关 键 词：真空吸附 平面镜片 吸附孔式夹具 装夹变形 面形调控 

分 类 号：TH162[机械工程—机械制造及自动化]