Active Control Method for Frequency Domain Error of Aerostatic Spindle Based on Acoustic Levitation  

作　　者：Guoda Chen Zhaoshou Chen Yifan Ge 

机构地区：[1]College of Mechanical Engineering,Zhejiang University of Technology,Hangzhou 310023,China [2]Key Laboratory of Special Purpose Equipment and Advanced Processing Technology,Ministry of Education and Zhejiang Province,Zhejiang University of Technology,Hangzhou 310023,China

出　　处：《Chinese Journal of Mechanical Engineering》2025年第1期119-139,共21页中国机械工程学报(英文版)

基　　金：Supported by National Natural Science Foundation of China(Grant No.52475494);Zhejiang Provincial Natural Science Foundation of China(Grant No.LY22E050003);Fundamental Research Funds for the Provincial Universities of Zhejiang(Grant No.RF-A2020005).

摘　　要：In the machining of high-end optical components,the aerostatic spindle error of an ultra-precision machine tool has a significant impact on the surface quality of the machined surfaces.The surfaces of many high-end optical components need to meet the extremely stringent requirements of the full-frequency band error,which poses significant challenge to the control of the aerostatic spindle error.In this research,we put forward an active control method for the frequency domain error of the aerostatic spindle based on acoustic levitation,in which the acousticmagnetism-fluid-solid multi-field coupling rotor dynamics modeling method of the aerostatic spindle was proposed and the corresponding multi-field coupling model was established.Through the numerical simulation and preliminary experiments,the influence law of acoustic levitation on the frequency domain error of the aerostatic spindle is obtained.The results showed that acoustic levitation can be used to control the frequency domain error of the aerostatic spindle to some extent,which verified the effectiveness of the proposed method.

关 键 词：Acoustic levitation Aerostatic spindle Multi-field coupling Numerical model Frequency domain error 

分 类 号：TH161[机械工程—机械制造及自动化]