面向细胞微操作的柔性并联压电定位台设计与实验  

Design and experiments of a flexible parallel piezoelectric micro-positioning stage for cell micromanipulation

作　　者：康升征 王浩文 KANG Shengzheng;WANG Haowen(School of Automation,Nanjing University of Information Science and Technology,Nanjing 210044,China)

机构地区：[1]南京信息工程大学自动化学院,江苏南京210044

出　　处：《光学精密工程》2025年第2期220-235,共16页Optics and Precision Engineering

基　　金：国家自然科学基金项目(No.52405117);江苏省自然科学基金项目(No.BK20220449)。

摘　　要：为实现细胞级的操作如细胞捕获、切割、分离及注射,本文设计了一种面向生物细胞工程的柔性并联压电定位台,并对其进行了建模、仿真和测试。该定位台由动平台、底座、三级放大机构和三个压电作动器组成。压电作动器所产生的位移经三级放大机构进行放大,并通过反馈控制实现定位台的精确运动,从而达到目标定位效果。在设计过程中,采用了伪刚体法结合柔性铰链刚度计算模型对该机构进行运动静力学分析。利用Lagrange方程,采用集中质量法建立所设计的柔性并联压电定位台动力学模型。在确定结构参数后,对其进行了有限元分析,以验证推导出的理论模型,仿真结果表明:理论与仿真模型的误差小于10%,该机构能够实现大行程以及较高频率的运动。此外,还搭建了柔性并联压电定位台样机系统,进行了实验测试,以评估其开环和闭环性能。实验结果表明:所设计的定位台具有125μm×126μm的工作行程,X和Y方向上的固有频率分别为128.9 Hz,132.8 Hz,相应的运动分辨率均优于400 nm。In order to achieve cell-level operations such as cell capture,cutting,separation,and injection,a flexible parallel piezoelectric positioning stage for biocellular engineering was designed,modeled,simulated,and tested in this paper.The positioning stage consisted of a moving platform,a base,a three-stage amplification mechanism,and three piezoelectric actuators.The displacements generated by the piezoelectric actuators were amplified by the three-stage amplification mechanism,and the precise movement of the positioning stage was realized through feedback control,so as to achieve the target positioning effect.In the design process,the pseudo-rigid-body method combined with the flexible hinge stiffness calculation model was adopted to analyze the kinematic statics of the mechanism.The Lagrange equation was used to establish the dynamics model of the designed flexible parallel piezoelectric positioning stage using the lumped mass method.After determining the structural parameters,finite element analysis was carried out to verify the derived theoretical model,and the simulation results showed that the error between the theoretical and simulation models was less than 10%,and the mechanism was able to achieve a large stroke as well as a higher frequency of motion.In addition,a prototype system for the flexible parallel piezoelectric positioning stage was also built and experimentally tested to evaluate its open and closed loop performance.The experimental results show that the designed positioning stage has a working stroke of 125μm×126μm,the natural frequencies in the X-direction and Y-direction are 128.9 Hz and 132.8 Hz,and the corresponding motion resolution are both better than 400 nm,respectively.

关 键 词：细胞微操作 压电作动器 柔性并联机构 微定位平台 

分 类 号：TH112[机械工程—机械设计及理论]