硬质合金表面微流道沟槽的激光加工工艺研究  

Laser Etching of Microchannel on Cemented Carbide Surfaces

作　　者：张赛 吴雪[1] ZHANG Sai;WU Xue(School of Computer and Artificial Intelligence,Beijing Technology and Business University,Beijing,100048)

机构地区：[1]北京工商大学计算机与人工智能学院,北京100048

出　　处：《现代制造技术与装备》2025年第3期162-164,共3页Modern Manufacturing Technology and Equipment

摘　　要：采用波长为1064 nm的微秒激光对硬质合金射流阀基材表面进行百微米流道的刻蚀加工,研究单线刻蚀的影响因素以及微流道沟槽加工的工艺参数。结果表明,激光单脉冲能量是影响刻蚀深宽的主要因素;扫描速度与加工次数对刻蚀深宽有一定影响。扫描速度在激光单脉冲能量确定时对微流道的微观形貌及粗糙度影响显著。硬质合金表面微流道激光加工的适宜参数为激光单脉冲能量为500μJ、扫描速度为8 mm·s^(-1)、搭接间距为10μm、加工次数为6~10次。Etching microchannel through microsecond laser with 1064nm wavelength on cemented carbide surface was investigated.Single line etching and microchannel processing parameters were involved in this research.The results show that laser single pulse energy is the main factor of etching size,and scanning speed and process times affect etching depth and width.The micromorphology and roughness of microgroove were affected observably by scanning speed when laser single pulse energy is determined.500μJ laser single pulse energy,8 mm·s^(-1) scanning speed,10μm lapping distance and 6~10 process times were suitable parameters.

关 键 词：微秒激光 激光加工 硬质合金 微槽 

分 类 号：TG665[金属学及工艺—金属切削加工及机床]