基于激光辅助切削技术的微晶玻璃自由曲面加工研究(特邀)  

Research on freeform surface machining of glass-ceramic based on laser-assisted cutting technology(invited)

作　　者：樊明旭 赵建科[1] 郝伟[1] 丁蛟腾[1] 吉霞斌 孙国燕[1,2] FAN Mingxu;ZHAO Jianke;HAO Wei;DING Jiaoteng;JI Xiabin;SUN Guoyan(Xi’an Institute of Optics and Precision Mechanics,Chinese Academy of Sciences,Xi’an 710119,China;National University of Defense Technology,Changsha 410003,China)

机构地区：[1]中国科学院西安光学精密机械研究所,陕西西安710119 [2]国防科技大学,湖南长沙410003

出　　处：《红外与激光工程》2025年第3期139-146,I0001,共9页Infrared and Laser Engineering

基　　金：国家自然科学基金项目(62475281,52105493);陕西省自然科学基础研究计划项目(2023-JC-QN-0713);湖南省自然科学基金项目(2023JJ40670);中国科学院青年创新促进会项目(2023423);陕西军民融合英才支持项目(2024);陕西省三秦英才特殊支持计划(2024)。

摘　　要：为了获得较高质量的微晶玻璃自由曲面面形,将激光辅助加工(Laser assisted machining,LAM)和快速刀具伺服(Fast Tool Servo,FTS)技术相结合,设计研制可用于切削微晶玻璃自由曲面面形的激光辅助快速刀具伺服切削装置。利用弹性梁法理论计算柔性铰链机构中菱形放大机构的位移放大比,通过静力学仿真获得柔性铰链机构中两杠杆位移放大机构输出位移的绝对误差为0.17μm,机构位移放大比为6.35,柔性铰链机构具有良好的位移同步输出和放大特性,等效应力分析结果显示,柔性铰链机构的最大应力小于材料的许用应力,机构安全可靠。开展微晶玻璃静态激光辐照测温实验,确定实际加工中可接受的最大激光功率为75 W,开展激光辅助快速刀具伺服切削实验,获得微晶玻璃自由曲面形貌,结果表明:在激光辅助快速刀具伺服切削微晶玻璃过程中,表面粗糙度随着激光功率的增大而减小,随着主轴转速的减小而减小,当激光功率为75 W、主轴转速为50 rpm时,激光辅助快速刀具伺服切削相比于常规FTS切削,微晶玻璃表面粗糙度最大下降幅度为58.2%,充分验证激光辅助快速刀具伺服切削方式可有效提高微晶玻璃自由曲面的加工质量和效率。Objective Glass-ceramic is a kind of optical hard and brittle material with broad application prospects in aerospace,medical treatment,electronics and other fields.Glass-ceramic is required to process the free-form surface on the surface in many application scenes.However,due to the high hardness and brittleness of the glassceramic itself,the processing difficulty is greatly improved.Therefore,it is necessary to develop a precision or ultra-precision processing method that can effectively improve the processing quality and efficiency of the freeform surface of glass-ceramic.Methods In this paper,laser assisted machining(LAM)and fast tool servo(FTS)technologies are combined to design a laser-assisted fast tool servo cutting device which can be used to cut the free-form surface shape of glassceramic,and the structure and working mode of the device are described.The elastic beam method is used to calculate the displacement amplification ratio of the diamond amplification mechanism in the flexure hinge mechanism.The deviation and displacement amplification ratio of the output displacement of the two levers displacement amplification mechanism in the flexure hinge mechanism are obtained through the static simulation.The equivalent stress of the flexure hinge mechanism is analyzed.The static laser irradiation temperature measurement experiment of glass-ceramic is carried out to obtain the maximum laser power threshold that can be withstood by the actually processed glass-ceramic.The laser assisted fast tool servo cutting experiment is carried out to obtain the free-form surface topography of glass-ceramic.The surface roughness after conventional FTS cutting and laser assisted cutting is compared and analyzed,and the influence of process parameters on the surface roughness is also analyzed.Results and Discussions The theoretical displacement amplification ratio of the diamond amplification mechanism calculated by the elastic beam method is 2.83.The absolute error of the output displacement of the two levers displacement

关 键 词：微晶玻璃 自由曲面 激光辅助加工 快速刀具伺服 表面粗糙度 

分 类 号：TH161[机械工程—机械制造及自动化]