中红外外腔可调谐窄线宽量子级联激光器设计  

Design of mid-infrared external cavity tunable narrow-linewidth quantum cascade lasers

作　　者：贾涵 袁配 张东亮 张诗雅 崔锦涛 杜舒豪 刘铭[3] 成步文[4] 郑军[4] JIA Han;YUAN Pei;ZHANG Dongliang;ZHANG Shiya;CUI Jintao;DU Shuhao;LIU Ming;CHENG Buwen;ZHENG Jun(School of Instrumental Science and Opto-electronics Engineering,Beijing Information Science and Technology University,Beijing 100192,China;Key Laboratory of Ministry of Education Opto-electronics Measurement Technology and Instrument,Beijing Information Science and Technology University,Beijing 100016,China;No.11 Research Institute,China Electronics Technology Group Corporation(CETC),Beijing 100015,China;Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China)

机构地区：[1]北京信息科技大学仪器科学与光电工程学院,北京100192 [2]北京信息科技大学光电测试技术及仪器教育部重点实验室,北京100016 [3]中国电子科技集团公司第十一所,北京100015 [4]中国科学院半导体研究所,北京100083

出　　处：《红外与激光工程》2025年第3期192-202,共11页Infrared and Laser Engineering

基　　金：中国科协托举人才项目(YESS20200146);国家自然科学基金项目(62105039)。

摘　　要：可调谐量子级联激光器(Quantum Cascade Laser,QCL)在自由空间光通信、光谱检测等领域具有重要的应用前景。然而针对分布式反馈QCL存在的掩埋光栅二次外延工艺繁琐、表面光栅耦合效果不佳,以及光栅耦合不利于器件集成化、微型化等问题,提出利用硅基锗集成波导与F-P腔QCL混合集成来实现波长可调谐和窄线宽输出的方案,对中心波长4.6μm的可调谐QCL的硅基集成外腔部分进行了设计优化。通过时域有限差分法仿真,系统地分析了微环谐振器半径、耦合长度和耦合间隔等结构参数对中心波长偏移和透射率的影响。研究表明,微环谐振器耦合间隔的减小会显著影响输出光谱透射率和耦合系数,而耦合长度的增加则会影响输出光谱透射率并使中心波长向长波方向移动。此外,分析了Sagnac环形反射镜的耦合间隔对耦合系数和反射率的影响,结果表明耦合间隔的减小会导致反射率的增加。最后通过改变波导材料有效折射率,仿真模拟了调谐性能。最终确定当自由光谱范围为20 nm、线宽为0.18 nm时的微环谐振器的半径为41.5μm,耦合长度为4μm,耦合间隔为0.15μm;反射率为0.7时的反射镜的耦合长度为60μm,耦合间隔为0.345μm,相关参数和研究结论为实际器件制备提供了理论依据。Objective Tunable quantum cascade lasers have important application prospects in the field of free-space optical communication and spectral detection.However,in view of the cumbersome buried grating secondary epitaxial process,poor surface grating coupling,as well as the grating coupling is not conducive to the integration and miniaturization of the device in distributed feedback quantum cascade lasers,the use of silicon-based germanium integrated waveguide mixed with F-P cavity quantum cascade laser could achieve wavelength tunability and narrow linewidth output.The use of silicon-based germanium integrated waveguide and F-P cavity quantum cascade laser hybrid integration can not only achieve wavelength tunable and narrow linewidth output,but optimize the design of the silicon-based integrated cavity part of the tunable quantum cascade laser with a central wavelength of 4.6μm.Methods For QCL with a center wavelength of 4.6μm,the aim is to optimize the design of micro ring resonators through coupled wave theory and Finite Difference Time Domain(FDTD)simulation.The influence of structural parameters such as micro ring waveguide spacing,coupling length,and radius on the performance of center wavelength shift and transmission efficiency is systematically analyzed,and the optimized micro ring resonator parameters are determined by analyzing the simulation results.In addition,the interference of the waveguide spacing of Sagnac mirrors on the transmission spectral lines of the vernier filter was discussed.Finally,the excellent tuning performance of the designed silicon-based tunable laser external cavity was demonstrated through simulation.Results and Discussions The simulation results show that both the radius and the coupling length of the microring have an effect on the FSR,and as both increase,the FSR of the output spectrum becomes smaller(Fig.5,Fig.6).In addition,the coupling spacing of the micro-ring directly affects the size of the coupling coefficient,and the larger the coupling spacing is,the smaller the val

关 键 词：量子级联激光器 可调谐 时域有限差分法仿真 微环谐振器 Sagnac环形反射镜 

分 类 号：TN242[电子电信—物理电子学]