热压成形玻璃微透镜阵列的宏微特征尺寸测量  

Measurement of macro and micro characteristic dimensions for glass microlens arrays produced by hot embossing

作　　者：杨高 陈裕杰[1] 周陈标 任清瑞 龚峰 张志辉[3] YANG Gao;CHEN Yujie;ZHOU Chenbiao;REN Qingrui;GONG Feng;CHEUNG Chi Fai(College of Mechatronics and Control Engineering,Shenzhen University,Shenzhen 518060,China;Guangdong Provincial Key Laboratory of Micro/Nano Opto-mechatronics Engineering,Shenzhen University,Shenzhen 518060,China;State Key Laboratory of Ultra-precision Machining Technology,Hong Kong Polytechnic University,Hong Kong 999077,China)

机构地区：[1]深圳大学机电与控制工程学院,广东深圳518060 [2]深圳大学广东省微纳光机电工程技术重点实验室,广东深圳518060 [3]香港理工大学超精密加工技术国家重点实验室,中国香港999077

出　　处：《红外与激光工程》2025年第3期258-269,共12页Infrared and Laser Engineering

基　　金：国家自然科学基金叶企孙科学基金项目(U2341272);国家自然科学基金面上项目(52171076);广东省自然科学基金面上项目(2023A1515012239);香港特别行政区政府创新科技基金(GHP/142/19SZ)。

摘　　要：热压印技术是实现玻璃微透镜阵列高质量高效率制造的有效途径。为应对大批量热压印成形的玻璃微透镜阵列的质量检测需求,设计和搭建了一套基于机器视觉的宏微特征尺寸高效测量系统。在宏观测量模块中,基于改进的Zernike矩亚像素边缘检测算法计算玻璃元件的直径。在微观测量模块中,基于自动搜索最佳模板匹配的图像拼接算法得到较大区域的图像后,计算微透镜单元的直径、圆心坐标和圆度。将玻璃元件和模具对应位置的微透镜阵列图像进行配准,计算微透镜阵列形状的复制偏差。实验结果表明:热压印后的光学元件直径增加15.6μm,测量直径的平均误差为3.7μm。对于选取的850μm×150μm区域,建立微透镜阵列的复制偏差图,发现玻璃光学元件表面对角线的两微透镜中心距比模具表面两微透镜中心距增加1.423μm。该测量系统亦适用于其他复制技术所制造的微透镜阵列的复制偏差分析。Objective Glass microlens arrays,with calibration,focusing,diffusion illumination or imaging functions,are widely used in LED,OLED optics and artificial compound eyes.Hot embossing technology is a promising way for achieving mass production of glass microlens arrays.However,the glass material undergoes thermal expansion and mechanical deformation during hot embossing,which inevitably generates form errors in both macro and micro scales,thus deteriorating its optical performance.Therefore,there is a need to implement efficient and reliable quality control of high-volume glass microlens arrays produced hot embossing.Measurement instruments such as Taylor Hobson probe profilers and white light interferometers are of high-cost and low-efficiency,making it unsuitable to be used for inspection of high-volume and large-area glass microlens arrays.As a result,this study developed a machine-vision based measurement system for inspection of macro and micro features of glass microlens arrays formed by hot embossing.The highlight is that the machine-vision based inspection method with a modified image stitching algorithm is applied in efficiently evaluating the replication deviation of thermally embossed glass microlens array features for the first time.Methods Figure 3 shows the home-made vision inspection device for micro-optical components,which consists of two modules:macro inspection and micro inspection.The macro detection module consists of a 6-million-pixel CMOS camera,a lens with a low magnification of 0.7×,and a backlight.The microscopic inspection module consists of an 8-million-pixel CMOS camera,a lens with a high magnification of 40×,coaxial light source,and a XY linear stage with an accuracy of±1μm.In microscopic measurements,the precision positioning is realized by the XY linear stage and the linear encoders.Fig.4a shows the flowchart of the macro detection.First,the checkerboard pictures were taken by the CMOS camera.The internal and external parameter matrix and distortion parameters of the camera were o

关 键 词：微纳制造 微透镜阵列 尺寸检测 机器视觉 亚像素 

分 类 号：TH161[机械工程—机械制造及自动化]