电子制造中的静电放电风险与应对策略分析  

Analysis of Electrostatic Discharge Risks and Countermeasuressin Electronic Manufacturing

作　　者：刘祖耀 司立娜 颜志强 张海贝 刘路 LIU Zuyao;SI Lina;YAN Zhiqiang;ZHANG Haibei;LIU Lu(Shenzhen Great Wall Development Technology Co.,Ltd.,Guangdong 518025,China.)

机构地区：[1]深圳长城开发科技股份有限公司,广东518025

出　　处：《电子技术(上海)》2025年第1期427-429,共3页Electronic Technology

摘　　要：阐述基于ESD防护监控系统和生产执行系统中的数据,采用PCA排序方法对电子制造线体各工位的ESD风险进行分析评估。通过对某半导体器件ESD失效根因追溯数据的风险分析,结果显示与生产现场ESD工程技术分析调查结果的一致率约为80%,表明该方法能够有效快速识别ESD高风险工位。该方法可实时分析大量线体的监控要素,并将ESD风险反馈给生产管理者。This paper describes the analysis and evaluation of EsD risks at various workstations in electronic manufacturing lines using PCA sorting method based on data from ESD protection monitoring system and production execution system.It conducted a risk analysis on the root cause tracing data of EsD failure in a certain semiconductor device,and the results showed a consistency rate of about 80%with the investigation results of ESD engineering technology analysis on the production site,indicating that this method can effectively and quickly identify high-risk EsD workstations.This method can analyze the monitoring elements of a large number of production lines in real time and provide feedback on ESD risks to production managers.

关 键 词：主成分分析(PCA) ESD防护监控系统 工业数据挖掘 

分 类 号：TN03[电子电信—物理电子学]