基于COMSOL的飞秒激光烧蚀TC4仿真研究  

Simulation of TC4 Ablation by Femtosecond Laser Based on COMSOL

作　　者：宋宇阳 Yuyang Song(School of Mechanical Engineering,University of Shanghai for Science and Technology,Shanghai)

机构地区：[1]上海理工大学机械工程学院,上海

出　　处：《建模与仿真》2025年第2期47-55,共9页Modeling and Simulation

摘　　要：飞秒激光不同于传统连续激光,它具有脉宽极窄、峰值功率高等特点,能够实现对材料的无热熔处理。由于其刻蚀精度高、加工区域小且可控,常常被用作超精细加工。为探究飞秒激光加工过程中激光能量密度、光斑半径、激光脉宽对烧蚀直径的影响,本文基于双温模型,利用COMSOL有限元仿真软件,建立二维轴对称模型,求解TC4烧蚀阈值,验证了模型的准确性,然后通过正交试验法,分析了不同激光参数对TC4烧蚀深度的影响。Femtosecond laser is different from traditional continuous laser,it has the characteristics of extremely narrow pulse width,high peak power,and can realize the non-hot melt treatment of materials.Because of its high etching precision,small and controllable processing area,it is often used as a hyperfine machining.In order to explore the influence of laser energy density,spot radius and laser pulse width on ablation diameter during femtosecond laser processing,based on the two-temperature model,COMSOL finite element simulation software was used to establish a two-dimensional axisymmetric model,solve the TC4 ablation threshold,and verify the accuracy of the model.Then,through orthogonal test method,the influence of different laser parameters on the ablation diameter of TC4 was analyzed.

关 键 词：双温模型 TC4 正交试验 

分 类 号：TN249[电子电信—物理电子学]