Design of Differential Signal Processing Circuitry for Single-Frequency Laser Interferometry Displacement Measurement  

作　　者：Songxiang Liu Jingping Yan Can Tang 

机构地区：[1]Chongqing College of International Business and Economics,Chongqing 400000,China

出　　处：《Journal of Electronic Research and Application》2025年第2期258-267,共10页电子研究与应用

摘　　要：This thesis addresses the issues existing in traditional laser tracking displacement measurement technology in the field of ultraprecision metrology by designing a differential signal processing circuit for high-precision laser interferometric displacement measurement.A stable power supply module is designed to provide low-noise voltage to the entire circuit.An analog circuit system is constructed,including key circuits such as photoelectric sensors,I-V amplification,zero adjustment,fully differential amplification,and amplitude modulation filtering.To acquire and process signals,the PMAC Acc24E3 data acquisition card is selected,which realizes phase demodulation through reversible square wave counting,inverts displacement information,and a visual interface for the host computer is designed.Experimental verification shows that the designed system achieves micrometer-level measurement accuracy within a range of 0-10mm,with a maximum measurement error of less than 1.2μm,a maximum measurement speed of 6m/s,and a resolution better than 0.158μm.

关 键 词：Displacement Measurement Weak Signal Processing Differential Signal Data Acquisition 

分 类 号：TN247[电子电信—物理电子学]