Pressure sensor with wide detection range and high sensitivity for wearable human health monitoring  

作　　者：Lingchen Liu Ying Yuan Hao Xu Xiaokun Qin Xiaofeng Wang Zheng Lou Lili Wang 

机构地区：[1]State Key Laboratory of Semiconductor Physics and Chip Technologies,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China [2]Center of Materials Science and Optoelectronic Engineering,University of Chinese Academy of Sciences,Beijing 100049,China [3]Key Laboratory of Lignocellulosic Chemistry,College of Material Science and Technology,Beijing Forestry University,Beijing 100083,China [4]Sino-Russian International Joint Laboratory for Clean Energy and Energy Conversion Technology,College of Physics,Jilin University,Changchun 130012,China

出　　处：《Journal of Semiconductors》2025年第4期72-79,共8页半导体学报(英文版)

基　　金：support from Beijing Natural Science Foundation−Xiaomi Innovation Joint Fund(Grant No.L233009);the National Natural Science Foundation of China(NSFC Grant Nos.62422409,62174152 and 62374159);from the Youth Innovation Promotion Association of Chinese Academy of Sciences(Grant No.2020115).

摘　　要：High-performance flexible pressure sensors have garnered significant attention in fields such as wearable electronics and human-machine interfaces.However,the development of flexible pressure sensors that simultaneously achieve high sensitivity,a wide detection range,and good mechanical stability remains a challenge.In this paper,we propose a flexible piezoresistive pressure sensor based on a Ti_(3)C_(2)Tx(MXene)/polyethylene oxide(PEO)composite nanofiber membrane(CNM).The sensor,utilizing MXene(0.4 wt%)/PEO(5 wt%),exhibits high sensitivity(44.34 kPa^(−1)at 0−50 kPa,12.99 kPa^(−1)at 50−500 kPa)and can reliably monitor physiological signals and other subtle cues.Moreover,the sensor features a wide detection range(0−500 kPa),fast response and recovery time(~150/45 ms),and excellent mechanical stability(over 10000 pressure cycles at maximum load).Through an MXene/PEO sensor array,we demonstrate its applications in human physiological signal monitoring,providing a reliable way to expand the application of MXene-based flexible pressure sensors.

关 键 词：flexible pressure sensor wide detection range high sensitivity pulse wave detection 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]