乙炔含量对DLC涂层结构及力学性能的影响  

Effect of C_(2)H_(2)Content on the Structure and Mechanical Properties of DLC Coatings

作　　者：赵彦辉 于泽洋 郭兆信 于晓明 ZHAO Yanhui;YU Zeyang;GUO Zhaoxin;YU Xiaoming(Sino-German Institute of Engineering,Shanghai Technical Institute of Electronics&Information,Shanghai 201411,China;College of Materials Science and Engineering,Shenyang Ligong University,Shenyang 110159,China)

机构地区：[1]上海电子信息职业技术学院中德工程学院,上海201411 [2]沈阳理工大学材料科学与工程学院,沈阳110159

出　　处：《表面技术》2025年第7期98-108,共11页Surface Technology

基　　金：辽宁省教育厅高等学校基本科研项目(LJKZ0233-z)。

摘　　要：目的研究工作气氛中C_(2)H_(2)气体含量对含氢DLC涂层微观组织结构变化特征、力学性能、摩擦学性能及生物腐蚀性能的影响。方法采用电弧增强辉光放电(Arc Enhanced Glow Discharge,AEGD)离子源辅助电弧离子镀,在316L不锈钢表面沉积以Cr/CrC为过渡层的含氢DLC复合涂层,利用扫描电镜、激光3D显微镜、拉曼光谱、X射线光电子能谱仪表征DLC涂层的微观结构,采用纳米压痕仪、摩擦磨损试验机研究涂层的力学、摩擦学性能,采用电化学工作站研究涂层的生物腐蚀性能。结果随着C_(2)H_(2)含量的增加,真空室内离子密度降低,对涂层表面的轰击作用减弱,涂层的表面粗糙度增大,同时水静态接触角降低;拉曼光谱和XPS结果表明,随着C_(2)H_(2)含量的增加,涂层中拉曼谱峰强度ID/IG的比值呈现先降低后增大的趋势,涂层中sp^(3)键含量呈现先增加后降低的趋势,在体积分数33%的C_(2)H_(2)条件下制备的涂层的sp^(3)键含量高达78%;纳米压痕结果表明,涂层硬度、弹性模量、磨损率随着C_(2)H_(2)的含量呈先增加后降低的趋势;在体积分数33%的C_(2)H_(2)条件下制备的涂层的硬度和模量分别可高达61、414 GPa,摩擦磨损结果表明,磨损率随着C_(2)H_(2)含量的增加,呈先降低后略增加的趋势。结论在体积分数33%的C_(2)H_(2)条件下制备的涂层的硬度和弹性模量最高,摩擦因数最低,磨损率最低,耐磨性能最佳;在70%的C_(2)H_(2)下制备的涂层的腐蚀电流密度最低,自腐蚀电位最高,耐蚀性最佳。DLC coating is a metastable amorphous carbon coating material composed of diamond structure(sp^(3)hybrid bond)and graphite structure(sp2 hybrid bond)hybrid bonds.Compared with DLC coatings without hydrogen,DLC coatings with hydrogen have advantages in certain friction fields.In recent years,an arc enhanced glow discharge(AEGD)technology has been proposed,which is generally used for sputtering cleaning of the substrate surface before coating.The work aims to adopt the AEGD as an ion source,which is ionized by introducing carbon containing gas to generate plasma,and then deposited onto the surface of the substrate to form a hydrogen-contained DLC coating.A multifunctional vacuum hybird coating equipment produced by China was adopted,consisting of 5 arc targets and 1 AEGD ion source.The base materials were M2 high-speed steel and 304 stainless steel,with dimensions ofϕ20 mm×3 mm.Before coating,high-energy argon ions generated by AEGD were used to bombard and sputter the substrate surface for 50 minutes to remove the oxide layer and pollutants on the substrate surface.Next,Cr and CrC transition layer was deposited on the substrate surface with a Cr target(99.95%)before depositing the DLC.Then,in order to investigate the effect of C_(2)H_(2)gas flow rate on the performance of DLC coatings,the C_(2)H_(2)gas flow rates were controlled at 28,38,55,77,88 mL/min,and the coating time was 60 min.The surface morphology of the DLC coating was observed with a ZEISS Sigma 300 scanning electron microscope(SEM),the surface roughness was tested with an LS4000 laser 3D microscope produced by Olympus Corporation in Japan,the chemical composition and bonding were measured with Raman spectroscopy,and the composition and bonding status of the DLC coating were tested with an XPS(ESCALAB 250 spectrometer,Thermo Fisher Scientific).The nano hardness and elastic modulus were measured with a Nano Indentation G200,with an indentation depth of 80 nm.The HSR-2M high-speed reciprocating friction and wear testing machine produced by Lanzhou Zhon

关 键 词：DLC涂层 C_(2)H_(2)含量 纳米硬度 摩擦性能 电化学腐蚀 

分 类 号：TG174.444[金属学及工艺—金属表面处理]