高精度可调焦物镜精密装调技术研究  

Precision Assembly and Adjustment Technologies of High-precision Adjustable Focusing Objective Lens

作　　者：郑珊 张亚葛 张莉 王帅 胡小英[1] ZHENG Shan;ZHANG Yage;ZHANG Li;WANG Shuai;HU Xiaoying(School of Optoelectronic Engineering,Xi’an Technological University,Xi’an 710032,China)

机构地区：[1]西安工业大学光电工程学院,陕西西安710032

出　　处：《火箭军工程大学学报》2025年第2期59-69,共11页Journal of Rocket Force University of Engineering

基　　金：科技部基金(G2023041018L)。

摘　　要：针对高精度可调焦物镜装配过程中误差累积导致的成像质量下降问题,提出一种基于定量化装调工艺的精密装配方法,通过优化装配流程与关键参数控制,提升光学系统的装调精度与稳定性。基于Zemax仿真软件建立光学系统模型,通过调制传递函数(Modulation Transfer Function,MTF)灵敏度分析确定镜组偏心与倾斜对像质的敏感度。在工艺实施阶段,采用定心车床完成光学元件的初始定心加工,确保镜组一次装夹同轴度误差不大于10μm;结合中心偏测量仪对镜组姿态进行动态监测与定量反馈,实现了光轴偏差的微米级调整,使其偏心量不大于20μm、倾斜角不大于30″。结果表明:所提方法通过标准化装调流程与量化评价体系的结合,能够有效减小装配误差对光学系统成像质量的非线性干扰;与传统粗装调工艺相比,所提方法将可调焦物镜的波前像差由0.10λ(λ=632.8 nm)优化至0.06λ以下,在1、2、3 m三种物距下的MTF值(30 lp/mm)分别达到0.64、0.68和0.62,较优化前提升40%以上。To address image quality degradation caused by error accumulation during the assembly of high-precision adjustable-focus objective lenses,a precision assembly method based on assembly and adjustment technology was proposed.The assembly accuracy and stability of the optical system were improved by optimizing the assembly process and controlling key parameters.First,an optical system model was established based on the Zemax simulation software,and the sensitivity of the lens eccentricity and tilt of the lens group to the image quality was determined by sensitivity analysis of the MTF(Modulation Transfer Function).During the implementation phase,a centering lathe was used for the initial centering of optical components,ensuring that the coaxiality error of the lens group was≤10μm in a single clamping.The posture of the lens group was dynamically monitored and quantitative feedback was provided using a center deviation measurement instrument.Micron-level adjustment of the optical axis deviation was achieved,ensuring that the eccentricity was≤20μm and the tilt angle was≤30″.The results show that the proposed method significantly reduces the nonlinear interference of assembly errors on the imaging quality of optical systems by combining standardized assembly and adjustment processes with quantitative evaluation systems.Compared with traditional coarse adjustment methods,the proposed method reduces the wavefront aberration of the adjustable-focus objective lens from 0.10λ(λ=632.8 nm)to below 0.06λ.The MTF values(at 30 lp/mm)at 3 object distances of 1,2,and 3 m reach 0.64,0.68,and 0.62,respectively,representing an improvement of over 40%compared to the pre-optimization levels.

关 键 词：内调焦光学镜头 高精度装配 灵敏度分析 光轴校准 空间光学 

分 类 号：O439[机械工程—光学工程]