超低膨胀石英玻璃的制造及应用  

Manufacture and Application of Ultra-low Expansion Quartz Glass

作　　者：刘小舟 刘俊龙 樊明轩 朱梦瑶 刘海 张寒 LIU Xiaozhou;LIU Junlong;FAN Mingxuan;ZHU Mengyao;LIU Hai;ZHANG Han(Hubei Feilihua Quartz Glass Co.,Ltd.,Jingzhou 434000,China;Innovation Center for Special Optical Glass Materials Technology,Jingzhou 434000,China)

机构地区：[1]湖北菲利华石英玻璃股份有限公司,荆州434000 [2]特种光学玻璃材料技术创新中心,荆州434000

出　　处：《玻璃》2025年第4期8-14,共7页Glass

基　　金：荆州市科技计划项目(2024AA01)。

摘　　要：超低膨胀石英玻璃在室温区间下具有近零的热膨胀系数,常作为精密光路系统的反射镜、激光谐振腔体等部件应用于天基太空望远镜、半导体光刻设备用光学元件、原子钟等领域。通过综述超低膨胀石英玻璃的制备工艺和主要应用场景,对于今后继续开展国产自主可控的超低膨胀石英玻璃研究具有积极意义。Ultra-low expansion quartz glass has a near-zero coefficient of thermal expansion at room temperature and is often used as mirrors for precision optical path systems,laser resonator cavities and other components in space-based telescopes.It is also utilized in optical components for semiconductor lithography equipment,atomic clocks and other fields.In this review,the preparation process and main application field of ultra-low expansion quartz glass are reviewed,which is positive significance for further research on domestication controllable ultra-low expansion quartz glass.

关 键 词：超低膨胀石英玻璃 热膨胀系数 制备工艺 应用场景 

分 类 号：TQ171[化学工程—玻璃工业]