等离子体与化学氟化叠加处理对聚酰亚胺薄膜表面绝缘性能影响  

Synergistic Effect of Plasma and Chemical Fluorination Treatment on the Surface Insulation Properties of Polyimide Film

作　　者：乌江 何敏恒 王廷玉 王晓敏 张博[1,2] 尚鹏辉 WU Jiang;HE Minheng;WANG Tingyu;WANG Xiaomin;ZHANG Bo;SHANG Penghui(School of Electronics and Information,Xi’an Polytechnic University,Xi’an 710600,China;Xi’an Key Laboratory of Interconnected Sensing and Intelligent Diagnosis for Electrical Equipment,Xi’an 710600,China;CRRC Yongji Electric Co.,Ltd.,Xi’an 710016,China;Yangtze Delta Region Institute of University of Electronic Science and Technology of China,Huzhou 313001,China)

机构地区：[1]西安工程大学电子信息学院,西安710600 [2]西安市电气设备互联感知与智能诊断重点实验室,西安710600 [3]中车永济电机有限公司,西安710016 [4]电子科技大学长三角研究院(湖州),湖州313001

出　　处：《高电压技术》2025年第4期2025-2036,共12页High Voltage Engineering

基　　金：陕西省科技厅自然科学基础研究重点项目(2022JZ-35);湖州市自然科学资金项目(2023YZ04)。

摘　　要：为了提升直流电压下聚酰亚胺薄膜的表面绝缘性能,研究了等离子体和化学氟化两种单一处理以及二者叠加的表面处理方法对其直流沿面闪络特性的影响。首先,对聚酰亚胺薄膜分别进行不同时间的等离子体刻蚀以及在高温条件下对薄膜进行不同时间的化学氟化处理。其次,利用扫描电镜、傅里叶红外光谱和X射线光电子能谱对处理前后样品进行了观察,并进行了等温表面电位衰减、表面电导率和直流沿面闪络电压测量分析。结果分析表明,两种单一处理方法的影响机制不同:等离子体处理主要通过改变表面微观形貌提升了闪络电压,而氟化处理则主要通过改善陷阱分布特性显著提高了闪络电压。最后,将等离子体和氟化按先后次序进行叠加使用,两种叠加处理次序均显示出比单一处理方式更高的闪络电压提升效果。特别是先氟化后等离子体处理的方法,不仅在物理作用上通过形成块状凸起和明显的粗糙形貌提升绝缘性能,而且在化学作用上通过影响陷阱分布特性,减少深陷阱密度,从而综合两种方法的优点,闪络电压显著提高。To enhance the surface insulation properties of polyimide films under direct current voltage conditions,this paper investigates the effects of plasma and chemical fluorination treatments,as well as their combined application,on the DC flashover characteristics of the films.Firstly,polyimide films were etched with plasma for different durations and chemically fluorinated under high-temperature conditions for varying lengths of time.Secondly,scanning electron microscopy(SEM),Fourier transform infrared spectroscopy(FTIR),and X-ray photoelectron spectroscopy(XPS)were employed to observe the samples before and after treatment.Measurements and analyses were also conducted on their isothermal surface potential decay,surface conductivity,and DC flashover voltage.The results indicate that the two individual treatment methods have distinct mechanisms as follows:plasma treatment enhances the flashover voltage primarily by altering the surface micro-morphology,while fluorination treatment significantly improves the flashover voltage by improving trap distribution characteristics.Finally,the combination of plasma and fluorination treatments,in either order,demonstrates a higher flashover voltage enhancement compared to single treatments.In particular,the treatment sequence of fluorination followed by plasma not only physically improves insulation performance by forming bulk protrusions and a rough morphology but also chemically influences the trap distribution characteristics,reducing the density of deep traps.By combining the advantages of both methods,the flashover voltage is significantly increased.

关 键 词：等离子体表面处理 表面氟化 聚酰亚胺 闪络电压 陷阱特性 粗糙度 

分 类 号：TM215[一般工业技术—材料科学与工程] TM215.4[电气工程—电工理论与新技术]