基于二次调制双通道同步的高分辨力绝对式时栅角位移传感器  

High-resolution absolute time grating angular displacement sensor based on dual-channel synchronization of secondary modulation

作　　者：杨继森[1] 秦小东 桂强 徐杰 刘家红 Yang Jisen;Qin Xiaodong;Gui Qiang;Xu Jie;Liu Jiahong(Engineering Research Center of Mechanical Testing Technology and Equipment,Ministry of Education,Chongqing University of Technology,Chongqing 400054,China;Chongqing Tiema Industrial Group Co.,Ltd.,Chongqing 400050,China)

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程研究中心,重庆400054 [2]重庆铁马工业集团有限公司,重庆400050

出　　处：《仪器仪表学报》2025年第2期314-324,共11页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金项目(52175454);重庆市自然科学基金面上项目(CSTB2023NSCQ-MSX0382);重庆市教委科学技术研究计划重点项目(KJZD-K202301106);重庆理工大学研究生创新项目(gzlcx20242017)资助。

摘　　要：为了在不增加传感器尺寸的前提下,提高传感器的分辨力和测量精度,并实现绝对角位移测量,以满足空间受限的工业场合应用需求,故提出了一种基于二次调制双通道同步的高分辨力绝对式时栅角位移传感器设计方案。该传感器主要由定尺、动尺和驱动电路板组成,定尺上设置有精机码道的两路激励线圈、粗机码道的两路感应线圈、电磁耦合线圈的次级,动尺上设置有精机码道的两路感应线圈、粗机码道的两路激励线圈、电磁耦合线圈的初级,驱动电路板上设置有一组驱动信号发生电路、两组感应信号处理电路、FPGA核心电路。将动尺上精机码道的两路感应线圈与粗机码道的两路激励线圈串联在一起实现二次调制,当传感器精机码道的激励线圈上电工作时,精机码道的两路感应线圈上所感应的两路角位移电信号被调制到粗机码道上,从而实现了粗机码道与精机码道分辨力相加的目的,以此提升传感器的分辨力。同时将一路精机感应信号通过电磁耦合线圈回传到定尺端作为整周定位信号。通过FPGA同步解算这两路信号,实现绝对角位移测量。采用PCB工艺制作了外径为140 mm的传感器样机。实验结果表明,该传感器只需要一组驱动电路就能够实现绝对角位移测量,且分辨力从0.38″提升到0.2″,提高了47%,原始测量误差范围从±34.14″降低到±16.06″,降低了53%。To enhance sensor resolution and accuracy without increasing size,while enabling absolute angular displacement measurement for space-constrained industrial applications,this paper proposes a high-resolution absolute time grating angular displacement sensor using secondary modulation dual-channel synchronization.The sensor consists of a fixed ruler,a moving ruler,and a driving circuit board.The fixed ruler includes two fine machine code channel excitation coils,two coarse machine code channel induction coils,and the secondary winding of an electromagnetic coupling coil.The moving ruler has two fine machine code channel induction coils,two coarse machine code channel excitation coils,and the primary winding of the electromagnetic coupling coil.The driving circuit board contains a driving signal generator,two induction signal processors,and an FPGA core circuit.The fine machine code channel induction coils on the moving ruler are connected in series with the coarse machine code channel excitation coils for secondary modulation.When the fine machine code channel excitation coil is powered,the angular displacement signals from the fine machine code channel induction coils are modulated onto the coarse machine code channel,enhancing resolution by effectively integrating both channels.Additionally,one precision machine′s induction signal is transmitted back to the fixed ruler via the electromagnetic coupling coil as a full-cycle positioning signal.Both signals are processed synchronously by the FPGA for absolute angular displacement measurement.A prototype with an outer diameter of 140 mm was fabricated using PCB technology.Experiments show that the sensor achieves absolute angular displacement measurement with a single drive circuit,improving resolution from 0.38″to 0.2″(a 47%increase)and reducing measurement error from±34.14″to±16.06″(a 53%reduces).

关 键 词：角位移传感器 绝对式 二次调制 同步测量 

分 类 号：TH712[机械工程—测试计量技术及仪器]