3D printing of micro-nano devices and their applications  

作　　者：Naibo Zhang Zilai Wang Zixin Zhao Dongxing Zhang Junyu Feng Linghao Yu Zhanhong Lin Qiuquan Guo Jianming Huang Junfa Mao Jun Yang 

机构地区：[1]School of Electronic Engineering,Beijing University of Posts and Telecommunications,Beijing 100876,China [2]The 54th Research Institute of Electronics Technology Group Corporation(CETC 54),Beijing 100043,China [3]School of Shenzhen Institute for Advanced Study,University of Electronic Science and Technology of China,Shenzhen 518000,China [4]School of Electronics and Information Technology,Sun Yat-sen University,Guangzhou 510275,China [5]Shenzhen University,Shenzhen 518060,China

出　　处：《Microsystems & Nanoengineering》2025年第1期65-87,共23页微系统与纳米工程(英文)

摘　　要：In recent years,the utilization of 3D printing technology in micro and nano device manufacturing has garneredsignificant attention.Advancements in 3D printing have enabled achieving sub-micron level precision.Unlikeconventional micro-machining techniques,3D printing offers versatility in material selection,such as polymers.3Dprinting technology has been gradually applied to the general field of microelectronic devices such as sensors,actuators and flexible electronics due to its adaptability and efficacy in microgeometric design and manufacturingprocesses.Furthermore,3D printing technology has also been instrumental in the fabrication of microfluidic devices,both through direct and indirect processes.This paper provides an overview of the evolving landscape of 3D printingtechnology,delineating the essential materials and processes involved in fabricating microelectronic and microfluidicdevices in recent times.Additionally,it synthesizes the diverse applications of these technologies across differentdomains.

关 键 词：micro nano devices SENSORS flexible electronics microelectronic devices micro nano device manufacturing d printing actuators D printing 

分 类 号：TP3[自动化与计算机技术—计算机科学与技术]