Tunable MEMS-based meta-absorbers for nondispersive infrared gas sensing applications  

作　　者：Kunye Li Yuhao Liang Yuxin Liu Yu-Sheng Lin 

机构地区：[1]School of Electronics and Information Technology,Sun Yat-Sen University,510006 Guangzhou,China [2]School of Chemistry,Sun Yat-Sen University,510006 Guangzhou,China [3]Instrumental Analysis and Research Center,Sun Yat-Sen University,510275 Guangzhou,China [4]Sichuan University,610207 Chengdu,China

出　　处：《Microsystems & Nanoengineering》2025年第1期89-101,共13页微系统与纳米工程(英文)

基　　金：support from Guangdong Science and Technology Program(2024A0505050007);Guangdong Basic and Applied Basic Research Foundation(2024A1515013019).

摘　　要：In conventional nondispersive infrared(NDIR)gas sensors,a wide-spectrum IR source or detector must be combined with a narrowband filter to eliminate the interference of nontarget gases.Therefore,the multiplexed NDIR gas sensor requires multiple pairs of narrowband filters,which is not conducive to miniaturization and integration.Although plasmonic metamaterials or multilayer thin-film structures are widely applied in spectral absorption filters,realizing high-performance,large-area,multiband,and compact filters is rather challenging.In this study,we propose and demonstrate a narrowband meta-absorber based on a planar metal–insulator–metal(MIM)cavity with a metallic ultrathin film atop.Nearly perfect absorption of different wavelengths can be obtained by controlling the thickness of the dielectric spacer.More significantly,the proposed meta-absorber exhibits angle-dependent characteristics.The absorption spectra of different gases can be matched by changing the incident angle of the light source.We also preliminarily investigate the CO_(2) gas sensing capability of the meta-absorber.Afterward,we propose a tunable meta-absorber integrated with a microelectromechanical system(MEMS)-based electrothermal actuator(ETA).By applying a direct current(DC)bias voltage,the inclination angle of the meta-absorber can be controlled,and the relationship between the inclination angle and the applied voltage can be deduced theoretically.The concept of a tunable MEMS-based meta-absorber offers a new way toward highly integrated,miniaturized and energy-efficient NDIR multigas sensing systems.

关 键 词：narrowband filter tunable meta absorber plasmonic metamaterials spectral absorption filtersrealizing meta absorber miniaturization integrationalthough narrowband filterswhich MEMS based 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]